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Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process
Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process
Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process
Mosavat, Mohammad (Autor:in) / Rahimi, Abdolreza (Autor:in)
Wear = ; 424 ; 143-150
01.01.2019
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.89
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