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Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process

Mosavat, Mohammad / Rahimi, Abdolreza

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Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process

Mosavat, Mohammad / Rahimi, Abdolreza

Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process

Mosavat, Mohammad / Rahimi, Abdolreza

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Numerical-experimental study on polishing of silicon wafer using magnetic abrasive finishing process

Contributors:

Mosavat, Mohammad (author) / Rahimi, Abdolreza (author)

Published in:

Wear = ; 424 ; 143-150

Publication date:

2019-01-01

Size:

8 pages

ISSN:

0043-1648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.89

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