Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer
Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer
Micro machining process of high temperature pressure sensor gauge chip based on SIMOX SOI wafer
Wang, Quan (Autor:in) / Ding, Jianning (Autor:in) / Xue, Wei (Autor:in) / Ling, Zhiyong (Autor:in)
International journal of material & product technology ; 31 ; 375-385
01.01.2008
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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