Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-CONTAINING WORKPIECE
Provided are a method and a device for producing a silicon carbide-containing workpiece in which: a blank (2) is held in a heated reactor (1), a gas composition is conducted into the reactor (1) as a precursor for the silicon carbide production, wherein the gas composition contains gaseous tetrachlorosilane as the silicon source and a hydrocarbon gas as the carbon source, and the silicon carbide-containing workpiece is produced from the blank (2) under the action of the gas composition.
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-CONTAINING WORKPIECE
Provided are a method and a device for producing a silicon carbide-containing workpiece in which: a blank (2) is held in a heated reactor (1), a gas composition is conducted into the reactor (1) as a precursor for the silicon carbide production, wherein the gas composition contains gaseous tetrachlorosilane as the silicon source and a hydrocarbon gas as the carbon source, and the silicon carbide-containing workpiece is produced from the blank (2) under the action of the gas composition.
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-CONTAINING WORKPIECE
GREULICH-WEBER SIEGMUND (Autor:in)
22.08.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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