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METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-COMPRISING WORKPIECE
A method and a device are provided for producing a silicon carbide-comprising workpiece, wherein: a carbon-containing shaped piece (2) is held in a first reactor (1) at a first temperature permitting the transformation of the shaped piece (2) into the silicon carbide-comprising workpiece; a carbon- and silicon-containing precursor is conveyed into a second reactor (3), which is held at a second temperature, higher than the first temperature, and which converts the precursor into an Si-C-containing gas, and the Si-C-containing gas is guided out of the second reactor (3) into the first reactor (1) and to the shaped piece (2) held at the first temperature in the first reactor (1), the shaped piece (2) being transformed in this process into the silicon carbide-comprising workpiece.
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-COMPRISING WORKPIECE
A method and a device are provided for producing a silicon carbide-comprising workpiece, wherein: a carbon-containing shaped piece (2) is held in a first reactor (1) at a first temperature permitting the transformation of the shaped piece (2) into the silicon carbide-comprising workpiece; a carbon- and silicon-containing precursor is conveyed into a second reactor (3), which is held at a second temperature, higher than the first temperature, and which converts the precursor into an Si-C-containing gas, and the Si-C-containing gas is guided out of the second reactor (3) into the first reactor (1) and to the shaped piece (2) held at the first temperature in the first reactor (1), the shaped piece (2) being transformed in this process into the silicon carbide-comprising workpiece.
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-COMPRISING WORKPIECE
GREULICH-WEBER SIEGMUND (Autor:in)
15.08.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
METHOD AND DEVICE FOR PRODUCING A SILICON CARBIDE-CONTAINING WORKPIECE
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