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Preparation method of cubic phase zirconium oxide nanocrystal film
The invention relates to a preparation method of a cubic phase zirconium oxide nanocrystal film, belonging to the technical field of preparation of nanocrystal film materials. According to the invention, 8% mol of yttrium-doped stable cubic phase zirconium oxide sol (8YSZ) is prepared by using zirconium oxychloride as a zirconium source, yttrium nitrate as dopant and oxalic acid as precipitant. The whole preparation process of the sol is implemented at room temperature, thus better facilitating the operation. The cubic phase ZrO2 film is prepared by using a monocrystal Si wafer as a substrate through a method of spin coating before annealing treatment. The surface of the film is smooth and free of cracks, and a pure cubic phase can be achieved at a relatively low heat treatment temperature; and crystal grains of the film are small and are uniformly distributed.
Preparation method of cubic phase zirconium oxide nanocrystal film
The invention relates to a preparation method of a cubic phase zirconium oxide nanocrystal film, belonging to the technical field of preparation of nanocrystal film materials. According to the invention, 8% mol of yttrium-doped stable cubic phase zirconium oxide sol (8YSZ) is prepared by using zirconium oxychloride as a zirconium source, yttrium nitrate as dopant and oxalic acid as precipitant. The whole preparation process of the sol is implemented at room temperature, thus better facilitating the operation. The cubic phase ZrO2 film is prepared by using a monocrystal Si wafer as a substrate through a method of spin coating before annealing treatment. The surface of the film is smooth and free of cracks, and a pure cubic phase can be achieved at a relatively low heat treatment temperature; and crystal grains of the film are small and are uniformly distributed.
Preparation method of cubic phase zirconium oxide nanocrystal film
CHANG YONGQIN (Autor:in) / ZHANG JING (Autor:in) / WANG KA (Autor:in) / WAN KANG (Autor:in) / CHEN LIN (Autor:in) / CHEN QIONG (Autor:in) / LONG YI (Autor:in)
22.04.2015
Patent
Elektronische Ressource
Englisch
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