Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ANHYDRIDE COPOLYMER TOP COATS FOR ORIENTATION CONTROL OF THIN FILM BLOCK COPOLYMERS
For producing a high-quality lithography pattern, to use self-assembled block copolymer structures, it is required to regulate orientation of the structures in a thin film. Particularly, most of applications need cylinder- and plate-shaped orientations which are perpendicular to a surface of the block copolymer film. A preferred method of achieving the orientation is provided by heating. The present invention includes a use of a top coat for polarity-switching to regulate orientation of the block copolymer thin film by heating. The top coat may be spin-coated on the block copolymer thin film from a polar casting solvent and allow a composition to be changed and ''neutralized'' during thermal annealing. The top coat, otherwise, facilitates regulation of orientation of the block copolymer which would not be possible only by heating.
ANHYDRIDE COPOLYMER TOP COATS FOR ORIENTATION CONTROL OF THIN FILM BLOCK COPOLYMERS
For producing a high-quality lithography pattern, to use self-assembled block copolymer structures, it is required to regulate orientation of the structures in a thin film. Particularly, most of applications need cylinder- and plate-shaped orientations which are perpendicular to a surface of the block copolymer film. A preferred method of achieving the orientation is provided by heating. The present invention includes a use of a top coat for polarity-switching to regulate orientation of the block copolymer thin film by heating. The top coat may be spin-coated on the block copolymer thin film from a polar casting solvent and allow a composition to be changed and ''neutralized'' during thermal annealing. The top coat, otherwise, facilitates regulation of orientation of the block copolymer which would not be possible only by heating.
ANHYDRIDE COPOLYMER TOP COATS FOR ORIENTATION CONTROL OF THIN FILM BLOCK COPOLYMERS
WILLSON CARLTON GRANT (Autor:in) / ELLISON CHRISTOPHER JOHN (Autor:in) / SESHIMO TAKEHIRO (Autor:in) / CUSHEN JULIA (Autor:in) / BATES CHRISTOPHER M (Autor:in) / DEAN LEON (Autor:in) / SANTOS LOGAN J (Autor:in) / RAUSCH ERICA L (Autor:in) / MAHER MICHAEL (Autor:in)
06.05.2015
Patent
Elektronische Ressource
Englisch
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