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Production method of silicon nitride crucible
The invention relates to a production method of a silicon nitride crucible, which comprises the steps that: pure water and absolute ethyl alcohol are added to silicon nitride powder, so that a slurry material is obtained; a silicon nitride seed crystal and silicon carbide are added, and stirred for 15-18h, wherein the average particle size of the slurry material is controlled at 0.5-0.7 micrometer; polyvinyl alcohol is added to the slurry material, and stirred for 2-3h till no bubbles exist; the slurry material is subjected to spray granulation; spray granulation powder is obtained and molded by a square rubber mould, so that silicon nitride green bodies are obtained; the five molded silicon nitride green bodies are put in a sintering furnace for isostatic pressing sintering, so that five square silicon nitride sintered bodies with clamping grooves and clamping bulges formed at the edges of the sintered bodies are obtained; and the silicon nitride crucible is connected in a clamping bulge matching mode. According to the production method, the production safety is improved greatly; under the condition that raw silicon materials at the same weight are produced, the power consumption is reduced by 10%; no metal impurities exist in a sintering auxiliary agent, so that the yield of a finished silicon crystal product is increased by 5% after the raw silicon material is crystallized; and the cost of the silicon nitride crucible is greatly lower than that of a quartz crucible.
Production method of silicon nitride crucible
The invention relates to a production method of a silicon nitride crucible, which comprises the steps that: pure water and absolute ethyl alcohol are added to silicon nitride powder, so that a slurry material is obtained; a silicon nitride seed crystal and silicon carbide are added, and stirred for 15-18h, wherein the average particle size of the slurry material is controlled at 0.5-0.7 micrometer; polyvinyl alcohol is added to the slurry material, and stirred for 2-3h till no bubbles exist; the slurry material is subjected to spray granulation; spray granulation powder is obtained and molded by a square rubber mould, so that silicon nitride green bodies are obtained; the five molded silicon nitride green bodies are put in a sintering furnace for isostatic pressing sintering, so that five square silicon nitride sintered bodies with clamping grooves and clamping bulges formed at the edges of the sintered bodies are obtained; and the silicon nitride crucible is connected in a clamping bulge matching mode. According to the production method, the production safety is improved greatly; under the condition that raw silicon materials at the same weight are produced, the power consumption is reduced by 10%; no metal impurities exist in a sintering auxiliary agent, so that the yield of a finished silicon crystal product is increased by 5% after the raw silicon material is crystallized; and the cost of the silicon nitride crucible is greatly lower than that of a quartz crucible.
Production method of silicon nitride crucible
GUO DAWEI (Autor:in) / XU CHENYOU (Autor:in) / LYU DONG (Autor:in) / BAI XIAOLONG (Autor:in)
01.07.2015
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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