Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Silicon carbide ceramic separation membrane and preparation method thereof
The invention discloses a silicon carbide ceramic separation membrane, which comprises a porous oxide ceramic matrix and a silicon carbide membrane, wherein the silicon carbide membrane is arranged onthe surface of the porous oxide ceramic matrix, and has an open porous structure, and the porous oxide ceramic matrix is a flat plate type porous ceramic or disc type porous ceramic. According to thesilicon carbide ceramic separation membrane disclosed by the invention, a silicon carbide membrane layer is deposited on the surface of a porous oxide ceramic matrix through a physical vapor deposition process to obtain a prefabricated silicon carbide ceramic separation membrane member, and then the prefabricated silicon carbide ceramic separation membrane member is treated at a high temperaturein a vacuum or inert atmosphere to finally prepare the silicon carbide ceramic separation membrane; the binding force of the silicon carbide membrane on the silicon carbide ceramic separation membraneand the porous oxide ceramic matrix is high, and the hardness of the silicon carbide membrane layer is high; and the preparation method is simple and easy to popularize.
本发明公开了碳化硅陶瓷分离膜，所述分离膜包括多孔氧化物陶瓷基体及碳化硅膜，所述碳化硅膜设置在所述多孔氧化物陶瓷基体的表面，且所述碳化硅膜为开口多孔结构，所述多孔氧化物陶瓷基体为平板式多孔陶瓷或碟式多孔陶瓷。本发明所述的碳化硅陶瓷分离膜是通过物理气相沉积工艺在多孔氧化物陶瓷基体的表面沉积碳化硅膜层，得到预制碳化硅陶瓷分离膜件，然后将预制碳化硅陶瓷分离膜件在真空或惰性气氛气氛下进行高温处理，最终制得所述碳化硅陶瓷分离膜，本发明中所述碳化硅陶瓷分离膜上的碳化硅膜与多孔氧化物陶瓷基体的结合力强，且碳化硅膜层的硬度高，所述制备方法简单，易于推广。
Silicon carbide ceramic separation membrane and preparation method thereof
The invention discloses a silicon carbide ceramic separation membrane, which comprises a porous oxide ceramic matrix and a silicon carbide membrane, wherein the silicon carbide membrane is arranged onthe surface of the porous oxide ceramic matrix, and has an open porous structure, and the porous oxide ceramic matrix is a flat plate type porous ceramic or disc type porous ceramic. According to thesilicon carbide ceramic separation membrane disclosed by the invention, a silicon carbide membrane layer is deposited on the surface of a porous oxide ceramic matrix through a physical vapor deposition process to obtain a prefabricated silicon carbide ceramic separation membrane member, and then the prefabricated silicon carbide ceramic separation membrane member is treated at a high temperaturein a vacuum or inert atmosphere to finally prepare the silicon carbide ceramic separation membrane; the binding force of the silicon carbide membrane on the silicon carbide ceramic separation membraneand the porous oxide ceramic matrix is high, and the hardness of the silicon carbide membrane layer is high; and the preparation method is simple and easy to popularize.
本发明公开了碳化硅陶瓷分离膜，所述分离膜包括多孔氧化物陶瓷基体及碳化硅膜，所述碳化硅膜设置在所述多孔氧化物陶瓷基体的表面，且所述碳化硅膜为开口多孔结构，所述多孔氧化物陶瓷基体为平板式多孔陶瓷或碟式多孔陶瓷。本发明所述的碳化硅陶瓷分离膜是通过物理气相沉积工艺在多孔氧化物陶瓷基体的表面沉积碳化硅膜层，得到预制碳化硅陶瓷分离膜件，然后将预制碳化硅陶瓷分离膜件在真空或惰性气氛气氛下进行高温处理，最终制得所述碳化硅陶瓷分离膜，本发明中所述碳化硅陶瓷分离膜上的碳化硅膜与多孔氧化物陶瓷基体的结合力强，且碳化硅膜层的硬度高，所述制备方法简单，易于推广。
Silicon carbide ceramic separation membrane and preparation method thereof
碳化硅陶瓷分离及其制备方法
XI HONG'AN (Autor:in) / ZHAO JUNLIANG (Autor:in) / MAI BAOXIANG (Autor:in) / LU QINGXIAN (Autor:in)
10.04.2020
Patent
Elektronische Ressource
Chinesisch
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