Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for manufacturing multilayer co-fired ceramic substrate cavity
The invention provides a manufacturing method of a multilayer co-fired ceramic substrate cavity. The manufacturing method can reduce stress generated on the inner wall of the cavity when sacrificial materials volatilize. During laminating operation, a sacrificial layer is filled in a cavity with the length-width ratio of a single-side opening being larger than 10:1, and the sacrificial layer is formed by compounding or mixing the sacrificial materials volatilized at different temperatures; and during sintering operation, the sacrificial materials volatilized at different temperatures are sequentially heated to the corresponding volatilization temperatures and subjected to heat preservation, glue discharging operation is completed while the sacrificial materials are sequentially volatilized, and then the sacrificial materials are heated to the sintering temperature and sintered.
本发明提供了一种多层共烧陶瓷基板空腔的制作方法，其能减小牺牲材料挥发时对空腔内壁产生的应力。其技术方案是这样的：在进行叠压操作时，先在单侧开口的长宽比大于10：1的空腔内填充牺牲层，牺牲层由在不同温度下挥发的牺牲材料复合或者混合而成；在进行烧结操作时，依次加热到不同温度下挥发的牺牲材料相应的挥发温度并保温，使得牺牲材料依次挥发的同时完成排胶操作，再加热至烧结温度进行烧结。
Method for manufacturing multilayer co-fired ceramic substrate cavity
The invention provides a manufacturing method of a multilayer co-fired ceramic substrate cavity. The manufacturing method can reduce stress generated on the inner wall of the cavity when sacrificial materials volatilize. During laminating operation, a sacrificial layer is filled in a cavity with the length-width ratio of a single-side opening being larger than 10:1, and the sacrificial layer is formed by compounding or mixing the sacrificial materials volatilized at different temperatures; and during sintering operation, the sacrificial materials volatilized at different temperatures are sequentially heated to the corresponding volatilization temperatures and subjected to heat preservation, glue discharging operation is completed while the sacrificial materials are sequentially volatilized, and then the sacrificial materials are heated to the sintering temperature and sintered.
本发明提供了一种多层共烧陶瓷基板空腔的制作方法，其能减小牺牲材料挥发时对空腔内壁产生的应力。其技术方案是这样的：在进行叠压操作时，先在单侧开口的长宽比大于10：1的空腔内填充牺牲层，牺牲层由在不同温度下挥发的牺牲材料复合或者混合而成；在进行烧结操作时，依次加热到不同温度下挥发的牺牲材料相应的挥发温度并保温，使得牺牲材料依次挥发的同时完成排胶操作，再加热至烧结温度进行烧结。
Method for manufacturing multilayer co-fired ceramic substrate cavity
一种多层共烧陶瓷基板空腔的制作方法
CHEN JIANGCUI (Autor:in) / CHEN ZHI (Autor:in) / MA HAORAN (Autor:in) / TANG AN (Autor:in)
15.05.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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