Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Semiconductor workshop clean room
The invention discloses a semiconductor workshop clean room, and relates to the technical field of clean rooms. The semiconductor workshop clean room comprises a clean working room, an air supply system, an air return system and a filtering system are arranged in the clean working room, the clean working room comprises a clean operation area and a processing service area, and a compartmentation area is arranged between the clean operation area and the processing service area; the compartmentation area comprises a vertical air supply area and a horizontal air supply area, a longitudinal air flow wall and a transverse air flow wall are formed in the vertical air supply area and the horizontal air supply area respectively, and an interval is formed between the longitudinal air flow wall and the transverse air flow wall, a vector air supply system and a one-way air supply system are arranged in the clean operation area, and a turbulent flow air supply system is arranged in the processing service area. The clean operation area and the processing service area achieve the purpose of limiting turbulent flow or vortex through the compartmentation area between the clean operation area and the processing service area and the air supply system, the air return system and the filtering system which are independent of each other, and therefore the purpose of improving the air cleanliness in the clean room is achieved.
本发明公开了一种半导体厂房洁净室，涉及洁净室技术领域，包括有洁净工作室，且洁净工作室内设置有送风系统、回风系统和过滤系统，洁净工作室包括有洁净作业区和加工服务区，且洁净作业区与加工服务区之间设置有分隔区；分隔区包括有垂直送风区和水平送风区，垂直送风区和水平送风区分别形成有纵向气流墙和横向气流墙，且纵向气流墙与横向气流墙之间形成有间隔区间。洁净作业区内设置有矢量送风系统和单向送风系统，加工服务区内设置有乱流送风系统。洁净作业区和加工服务区通过两者中间的分隔区以及各自独立的送风系统、回风系统以及过滤系统，达到限制乱流或者涡流出现的目的，进而达到提高洁净室内空气洁净度的目的。
Semiconductor workshop clean room
The invention discloses a semiconductor workshop clean room, and relates to the technical field of clean rooms. The semiconductor workshop clean room comprises a clean working room, an air supply system, an air return system and a filtering system are arranged in the clean working room, the clean working room comprises a clean operation area and a processing service area, and a compartmentation area is arranged between the clean operation area and the processing service area; the compartmentation area comprises a vertical air supply area and a horizontal air supply area, a longitudinal air flow wall and a transverse air flow wall are formed in the vertical air supply area and the horizontal air supply area respectively, and an interval is formed between the longitudinal air flow wall and the transverse air flow wall, a vector air supply system and a one-way air supply system are arranged in the clean operation area, and a turbulent flow air supply system is arranged in the processing service area. The clean operation area and the processing service area achieve the purpose of limiting turbulent flow or vortex through the compartmentation area between the clean operation area and the processing service area and the air supply system, the air return system and the filtering system which are independent of each other, and therefore the purpose of improving the air cleanliness in the clean room is achieved.
本发明公开了一种半导体厂房洁净室，涉及洁净室技术领域，包括有洁净工作室，且洁净工作室内设置有送风系统、回风系统和过滤系统，洁净工作室包括有洁净作业区和加工服务区，且洁净作业区与加工服务区之间设置有分隔区；分隔区包括有垂直送风区和水平送风区，垂直送风区和水平送风区分别形成有纵向气流墙和横向气流墙，且纵向气流墙与横向气流墙之间形成有间隔区间。洁净作业区内设置有矢量送风系统和单向送风系统，加工服务区内设置有乱流送风系统。洁净作业区和加工服务区通过两者中间的分隔区以及各自独立的送风系统、回风系统以及过滤系统，达到限制乱流或者涡流出现的目的，进而达到提高洁净室内空气洁净度的目的。
Semiconductor workshop clean room
一种半导体厂房洁净室
WANG JUNYI (Autor:in) / HONG ZHEN (Autor:in)
19.06.2020
Patent
Elektronische Ressource
Chinesisch
Safety plate of clean room for manufacturing semiconductor and clean room using the same
Europäisches Patentamt | 2019
Safety plate of clean room for manufacturing semiconductor and clean room using the same
| Europäisches Patentamt | 2018