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Ceramic, probe guidance component, probe card, and package inspecting socket

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic includes, in mass%, 20.0-60.0% of Si3N4, 25.0-70.0% of ZrO2, and 5.0-15.0% of at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5. The ceramic has a thermal expansion coefficient similar to that of silicon, exhibits excellent mechanical strength, can be processed on a fine scale with high accuracy, and is capable of inhibiting the formation of particles.

一种陶瓷，其以质量％计含有：SiN：20.0～60.0％；ZrO：25.0～70.0％；以及，选自MgO、YO、CeO、CaO、HfO、TiO、AlO、SiO、MoO、CrO、CoO、ZnO、GaO、TaO、NiO和VO中的1种以上：5.0～15.0％。该陶瓷具有与硅同等程度的热膨胀系数和优异的机械强度，且能够高精度地实现精细加工，并且能够抑制微粒产生。

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Ceramic, probe guidance component, probe card, and package inspecting socket

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic includes, in mass%, 20.0-60.0% of Si3N4, 25.0-70.0% of ZrO2, and 5.0-15.0% of at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5. The ceramic has a thermal expansion coefficient similar to that of silicon, exhibits excellent mechanical strength, can be processed on a fine scale with high accuracy, and is capable of inhibiting the formation of particles.

一种陶瓷，其以质量％计含有：SiN：20.0～60.0％；ZrO：25.0～70.0％；以及，选自MgO、YO、CeO、CaO、HfO、TiO、AlO、SiO、MoO、CrO、CoO、ZnO、GaO、TaO、NiO和VO中的1种以上：5.0～15.0％。该陶瓷具有与硅同等程度的热膨胀系数和优异的机械强度，且能够高精度地实现精细加工，并且能够抑制微粒产生。

Ceramic, probe guidance component, probe card, and package inspecting socket

YAMAGISHI WATARU / MORI KAZUMASA / ETO SHUNICHI

A ceramic includes, in mass%, 20.0-60.0% of Si3N4, 25.0-70.0% of ZrO2, and 5.0-15.0% of at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5. The ceramic has a thermal expansion coefficient similar to that of silicon, exhibits excellent mechanical strength, can be processed on a fine scale with high accuracy, and is capable of inhibiting the formation of particles.

一种陶瓷，其以质量％计含有：SiN：20.0～60.0％；ZrO：25.0～70.0％；以及，选自MgO、YO、CeO、CaO、HfO、TiO、AlO、SiO、MoO、CrO、CoO、ZnO、GaO、TaO、NiO和VO中的1种以上：5.0～15.0％。该陶瓷具有与硅同等程度的热膨胀系数和优异的机械强度，且能够高精度地实现精细加工，并且能够抑制微粒产生。

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Titel:

Ceramic, probe guidance component, probe card, and package inspecting socket

Weitere Titelangaben:

陶瓷、探针引导构件、探针卡及封装检查用插座

Beteiligte:

YAMAGISHI WATARU (Autor:in) / MORI KAZUMASA (Autor:in) / ETO SHUNICHI (Autor:in)

Erscheinungsdatum:

19.06.2020

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Chinesisch

Klassifikation:

IPC: C04B Kalk , LIME / G01R Messen elektrischer Größen , MEASURING ELECTRIC VARIABLES / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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