Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC, PROBE GUIDANCE COMPONENT, PROBE CARD, AND PACKAGE INSPECTING SOCKET
A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
CERAMIC, PROBE GUIDANCE COMPONENT, PROBE CARD, AND PACKAGE INSPECTING SOCKET
A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
CERAMIC, PROBE GUIDANCE COMPONENT, PROBE CARD, AND PACKAGE INSPECTING SOCKET
KERAMIK, SONDENFÜHRUNGSKOMPONENTE, SONDENKARTE UND PACKUNGSPRÜFDOSE
CÉRAMIQUE, CONSTITUANT DE GUIDAGE DE SONDE, CARTE À SONDE ET SUPPORT D'INSPECTION D'EMBALLAGE
YAMAGISHI WATARU (Autor:in) / MORI KAZUMASA (Autor:in) / ETO SHUNICHI (Autor:in)
23.06.2021
Patent
Elektronische Ressource
Englisch
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