Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Silicon carbide ceramic sucker and preparation method thereof
The invention relates to a silicon carbide ceramic sucker and a preparation method thereof. The silicon carbide ceramic sucker comprises a sucker body and a sucker base connected with the sucker body,the sucker base is provided with an air channel and an air exhaust connector, the sucker body is made of porous silicon carbide ceramic, and the sucker base is made of compact silicon carbide ceramic. The sucker body and the sucker base are bonded together through an organic binder or a high-temperature inorganic binder. The porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are prepared through a gel casting method, and the porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are compounded through a bonding or high-temperature sintering process to obtain the silicon carbide ceramic sucker. The ceramic sucker prepared from the silicon carbide material has the characteristics of ultrahigh planeness (up to 1 micron), difficulty in deformation, high temperature resistance, good acid and alkali corrosion resistance and the like, and can meet the high-precision use requirements of integrated circuit manufacturing equipment.
本发明是关于一种碳化硅陶瓷吸盘及其制备方法，该碳化硅陶瓷吸盘包括吸盘本体和与所述吸盘本体连接的吸盘底座，所述吸盘底座具有气体通道和抽气接口，所述吸盘本体的材质为多孔碳化硅陶瓷，所述吸盘底座的材质为致密碳化硅陶瓷；所述吸盘本体与所述吸盘底座通过有机粘结剂或者高温无机粘结剂粘结在一起。本发明通过采用凝胶注模法来制备多孔碳化硅陶瓷吸盘本体和致密碳化硅陶瓷吸盘底座，通过粘结或高温烧结工艺将两者复合得到碳化硅陶瓷吸盘。采用碳化硅材料制备的陶瓷吸盘具有超高的平面度(可达1微米)、不易变形，耐高温、耐酸碱腐蚀性能好等特点，可以满足集成电路制造装备高精度的使用要求。
Silicon carbide ceramic sucker and preparation method thereof
The invention relates to a silicon carbide ceramic sucker and a preparation method thereof. The silicon carbide ceramic sucker comprises a sucker body and a sucker base connected with the sucker body,the sucker base is provided with an air channel and an air exhaust connector, the sucker body is made of porous silicon carbide ceramic, and the sucker base is made of compact silicon carbide ceramic. The sucker body and the sucker base are bonded together through an organic binder or a high-temperature inorganic binder. The porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are prepared through a gel casting method, and the porous silicon carbide ceramic sucker body and the compact silicon carbide ceramic sucker base are compounded through a bonding or high-temperature sintering process to obtain the silicon carbide ceramic sucker. The ceramic sucker prepared from the silicon carbide material has the characteristics of ultrahigh planeness (up to 1 micron), difficulty in deformation, high temperature resistance, good acid and alkali corrosion resistance and the like, and can meet the high-precision use requirements of integrated circuit manufacturing equipment.
本发明是关于一种碳化硅陶瓷吸盘及其制备方法，该碳化硅陶瓷吸盘包括吸盘本体和与所述吸盘本体连接的吸盘底座，所述吸盘底座具有气体通道和抽气接口，所述吸盘本体的材质为多孔碳化硅陶瓷，所述吸盘底座的材质为致密碳化硅陶瓷；所述吸盘本体与所述吸盘底座通过有机粘结剂或者高温无机粘结剂粘结在一起。本发明通过采用凝胶注模法来制备多孔碳化硅陶瓷吸盘本体和致密碳化硅陶瓷吸盘底座，通过粘结或高温烧结工艺将两者复合得到碳化硅陶瓷吸盘。采用碳化硅材料制备的陶瓷吸盘具有超高的平面度(可达1微米)、不易变形，耐高温、耐酸碱腐蚀性能好等特点，可以满足集成电路制造装备高精度的使用要求。
Silicon carbide ceramic sucker and preparation method thereof
碳化硅陶瓷吸盘及其制备方法
LIU HAILIN (Autor:in) / JIA ZHIHUI (Autor:in) / HUANG XIAOTING (Autor:in) / HU CHUANQI (Autor:in) / LI HUI (Autor:in)
10.07.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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