Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ITO target material blank drying and degreasing device and drying and degreasing method
The invention provides an ITO target material blank drying and degreasing device and drying and degreasing method and belongs to the field of target material drying. The device improves the drying efficiency by using a microwave heater and infrared heating equipment and applying a mixed drying method of microwave drying and infrared drying. The target blank can move transversely in a reciprocatingmanner at a uniform speed in a drying process by means of a transverse moving guide rail, so that a uniform drying purpose is achieved, and therefore, a condition that the target blank is cracked asa result of non-uniform microwave drying or infrared drying is avoided. The device provided by the invention is a drying and degreasing integrated furnace. The drying and degreasing processes can be finished simultaneously in the same furnace, so that the process is simplified, and the investment of plant site equipment is saved.
本发明提供了一种ITO靶材坯体干燥脱脂装置及干燥脱脂方法，属于靶坯干燥领域。本发明提供的装置，利用了微波加热器和红外加热设备，使用了微波干燥和红外干燥混合干燥的方法，提高干燥的速率；横向移动导轨使靶坯在干燥过程中可以横向往复匀速运动，从而达到均匀干燥的目的，避免了微波干燥或红外干燥不均匀导致靶坯开裂的情况；且本发明所提供的装置是干燥脱脂一体炉，在同一个炉子可以同时完成干燥和脱脂两道工艺，简化了工艺，节省了工厂场地设备的投入。
ITO target material blank drying and degreasing device and drying and degreasing method
The invention provides an ITO target material blank drying and degreasing device and drying and degreasing method and belongs to the field of target material drying. The device improves the drying efficiency by using a microwave heater and infrared heating equipment and applying a mixed drying method of microwave drying and infrared drying. The target blank can move transversely in a reciprocatingmanner at a uniform speed in a drying process by means of a transverse moving guide rail, so that a uniform drying purpose is achieved, and therefore, a condition that the target blank is cracked asa result of non-uniform microwave drying or infrared drying is avoided. The device provided by the invention is a drying and degreasing integrated furnace. The drying and degreasing processes can be finished simultaneously in the same furnace, so that the process is simplified, and the investment of plant site equipment is saved.
本发明提供了一种ITO靶材坯体干燥脱脂装置及干燥脱脂方法，属于靶坯干燥领域。本发明提供的装置，利用了微波加热器和红外加热设备，使用了微波干燥和红外干燥混合干燥的方法，提高干燥的速率；横向移动导轨使靶坯在干燥过程中可以横向往复匀速运动，从而达到均匀干燥的目的，避免了微波干燥或红外干燥不均匀导致靶坯开裂的情况；且本发明所提供的装置是干燥脱脂一体炉，在同一个炉子可以同时完成干燥和脱脂两道工艺，简化了工艺，节省了工厂场地设备的投入。
ITO target material blank drying and degreasing device and drying and degreasing method
一种ITO靶材坯体干燥脱脂装置及干燥脱脂方法
HUANG TIANQI (Autor:in) / ZHANG KE (Autor:in) / LI KANG (Autor:in) / LI QIANG (Autor:in)
01.09.2020
Patent
Elektronische Ressource
Chinesisch