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Preparation method of high-purity boron nitride for sintering aluminum nitride substrate
The invention relates to a preparation method of high-purity boron nitride for sintering an aluminum nitride substrate. The method comprises the following steps of: a powder pretreatment and chargingprocess: vacuumizing boron nitride powder to 10Pa or below, carrying out sealing treatment, discharging gas in the powder, and keeping the pressure difference; performing powder filling in 2-5 procedures, conducting filling in 10 times in each procedure, and slowly applying a pressure intensity of 1-10MPa; and a sintering process: controlling the heating rate at 6-12DEG C/min, the pressurizing temperature at 1000-1200DEG C, conducting slow pressurizing by 0.5-5MPa increasingly, keeping the pressure at 26MPa, controlling the sintering temperature at 1650-1800DEG C, and keeping the heat preservation time longer than 2-4 hours; controlling the atmosphere: performing vacuumizing to less than 1KPa, filling high-purity argon or high-purity nitrogen, and conducting vacuumizing to be less than 100Pa again; and carrying out vacuum hot-pressing sintering, controlling the porosity of the blank to 24-26% or below, and performing molding. The prepared boron nitride is high in purity, good in air permeability, resistant to high temperature and high in mechanical strength.
一种用于氮化铝基板烧结用的高纯度氮化硼的制备方法，包括如下步骤：粉体预处理及装料工序：氮化硼粉体抽真空至10Pa以下，密封处理，排出粉体内部气体，保持压差；装料：粉体填装，分2‑5道工序填装，每道分10次装料，并缓慢施加压强1‑10MPa；烧结工序：升温速率6‑12℃/min，加压温度1000‑1200℃，缓慢加压0.5‑5MPa递增，并保压26MPa，烧结温度1650‑1800℃，保温时间大于2‑4小时；气氛控制：抽真空小于1KPa，再充入高纯氩或高纯氮，再次抽真空小于100Pa；真空热压烧结，坯料气孔率控制在24％～26％以下，成型。本发明制备的氮化硼高纯度、透气率好、耐高温、机械强度高。
Preparation method of high-purity boron nitride for sintering aluminum nitride substrate
The invention relates to a preparation method of high-purity boron nitride for sintering an aluminum nitride substrate. The method comprises the following steps of: a powder pretreatment and chargingprocess: vacuumizing boron nitride powder to 10Pa or below, carrying out sealing treatment, discharging gas in the powder, and keeping the pressure difference; performing powder filling in 2-5 procedures, conducting filling in 10 times in each procedure, and slowly applying a pressure intensity of 1-10MPa; and a sintering process: controlling the heating rate at 6-12DEG C/min, the pressurizing temperature at 1000-1200DEG C, conducting slow pressurizing by 0.5-5MPa increasingly, keeping the pressure at 26MPa, controlling the sintering temperature at 1650-1800DEG C, and keeping the heat preservation time longer than 2-4 hours; controlling the atmosphere: performing vacuumizing to less than 1KPa, filling high-purity argon or high-purity nitrogen, and conducting vacuumizing to be less than 100Pa again; and carrying out vacuum hot-pressing sintering, controlling the porosity of the blank to 24-26% or below, and performing molding. The prepared boron nitride is high in purity, good in air permeability, resistant to high temperature and high in mechanical strength.
一种用于氮化铝基板烧结用的高纯度氮化硼的制备方法，包括如下步骤：粉体预处理及装料工序：氮化硼粉体抽真空至10Pa以下，密封处理，排出粉体内部气体，保持压差；装料：粉体填装，分2‑5道工序填装，每道分10次装料，并缓慢施加压强1‑10MPa；烧结工序：升温速率6‑12℃/min，加压温度1000‑1200℃，缓慢加压0.5‑5MPa递增，并保压26MPa，烧结温度1650‑1800℃，保温时间大于2‑4小时；气氛控制：抽真空小于1KPa，再充入高纯氩或高纯氮，再次抽真空小于100Pa；真空热压烧结，坯料气孔率控制在24％～26％以下，成型。本发明制备的氮化硼高纯度、透气率好、耐高温、机械强度高。
Preparation method of high-purity boron nitride for sintering aluminum nitride substrate
一种用于氮化铝基板烧结的高纯度氮化硼的制备方法
JIANG MING (Autor:in) / YUE FENG (Autor:in) / LUO JIAWEI (Autor:in)
27.10.2020
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
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DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
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