Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of carbon/carbon composite material crucible
The invention provides a preparation method of a carbon/carbon composite crucible. The preparation method comprises the following steps: sequentially and alternately superposing a plurality of layersof carbon fiber plain cloth and a plurality of layers of carbon fiber net tires, and needling to compound the carbon fiber plain cloth and the carbon fiber net tires to obtain a prefabricated body; carrying out chemical vapor deposition on the prefabricated body by taking natural gas as a raw material and hydrogen or inert gas as carrier gas; carrying out high-temperature treatment on the prefabricated body subjected to chemical vapor deposition, and then machining the prefabricated body to the size of a crucible to obtain a prefabricated crucible; and carrying out chemical vapor deposition onthe prefabricated crucible again to obtain the crucible. According to the preparation method, carbon black is not easily generated in the first chemical vapor deposition process; by adjusting the volume ratio of natural gas to hydrogen or inert gas, pyrolytic carbon can be rapidly deposited in secondary chemical vapor deposition, a compact coating is formed on the surface of the prefabricated crucible, meanwhile, the strength of the pyrolytic carbon is higher due to the intermolecular binding force of the pyrolytic carbon, and therefore the coating is not prone to falling off due to corrosionof silicon steam.
本发明提供了一种炭/炭复合材料坩埚的制备方法，包括以下步骤：将碳纤维平纹布、碳纤维网胎依次交替叠加多层并通过针刺使之复合得到预制体；以天然气为原料，氢气或惰性气体为载气，对预制体进行化学气相沉积；对化学气相沉积后的预制体进行高温处理，然后机械加工至坩埚的尺寸得到预制坩埚；对预制坩埚再次进行化学气相沉积得到坩埚。该制备方法在第一次化学气相沉积过程中不易有炭黑生成；通过调整天然气与氢气或惰性气体之间的体积比，能够使得在第二次化学气相沉积中热解炭快速沉积，在预制坩埚表面形成致密的涂层，同时热解炭分子间结合力使其强度更高，从而使涂层不易受到硅蒸汽的腐蚀而脱落。
Preparation method of carbon/carbon composite material crucible
The invention provides a preparation method of a carbon/carbon composite crucible. The preparation method comprises the following steps: sequentially and alternately superposing a plurality of layersof carbon fiber plain cloth and a plurality of layers of carbon fiber net tires, and needling to compound the carbon fiber plain cloth and the carbon fiber net tires to obtain a prefabricated body; carrying out chemical vapor deposition on the prefabricated body by taking natural gas as a raw material and hydrogen or inert gas as carrier gas; carrying out high-temperature treatment on the prefabricated body subjected to chemical vapor deposition, and then machining the prefabricated body to the size of a crucible to obtain a prefabricated crucible; and carrying out chemical vapor deposition onthe prefabricated crucible again to obtain the crucible. According to the preparation method, carbon black is not easily generated in the first chemical vapor deposition process; by adjusting the volume ratio of natural gas to hydrogen or inert gas, pyrolytic carbon can be rapidly deposited in secondary chemical vapor deposition, a compact coating is formed on the surface of the prefabricated crucible, meanwhile, the strength of the pyrolytic carbon is higher due to the intermolecular binding force of the pyrolytic carbon, and therefore the coating is not prone to falling off due to corrosionof silicon steam.
本发明提供了一种炭/炭复合材料坩埚的制备方法，包括以下步骤：将碳纤维平纹布、碳纤维网胎依次交替叠加多层并通过针刺使之复合得到预制体；以天然气为原料，氢气或惰性气体为载气，对预制体进行化学气相沉积；对化学气相沉积后的预制体进行高温处理，然后机械加工至坩埚的尺寸得到预制坩埚；对预制坩埚再次进行化学气相沉积得到坩埚。该制备方法在第一次化学气相沉积过程中不易有炭黑生成；通过调整天然气与氢气或惰性气体之间的体积比，能够使得在第二次化学气相沉积中热解炭快速沉积，在预制坩埚表面形成致密的涂层，同时热解炭分子间结合力使其强度更高，从而使涂层不易受到硅蒸汽的腐蚀而脱落。
Preparation method of carbon/carbon composite material crucible
炭/炭复合材料坩埚的制备方法
LU YUHAI (Autor:in) / XU XIANGSHENG (Autor:in) / LYU CHUANSHENG (Autor:in) / QIAN WUZHONG (Autor:in)
04.12.2020
Patent
Elektronische Ressource
Chinesisch
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