Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of indium gallium zinc oxide target material
The invention discloses a preparation method of an indium gallium zinc oxide target material. The preparation method comprises the following steps of: adding indium oxide powder, gallium oxide powderand zinc oxide powder into a ball milling tank, adding a dispersing agent, an adhesive and pure water, performing mixing, carrying out pre-dispersion to obtain a mixed solution, and carrying out wet grinding on the mixed solution to obtain a mixed slurry; carrying out spray granulation on the mixed slurry, performing mixing and screening to obtain indium gallium zinc oxide powder; carrying out hydraulic forming and isostatic cool pressing on the indium gallium zinc oxide powder to obtain an indium gallium zinc oxide target blank; and sintering the indium gallium zinc oxide target blank, in thesintering process, laying a layer of substrate material at the bottom of the indium gallium zinc oxide target blank, and obtaining the indium gallium zinc oxide target material after completing sintering. According to the preparation method of the indium gallium zinc oxide target material, in the sintering process, a layer of substrate material is laid at the bottom of the target blank, and the target blank is sintered in the volatilization atmosphere of the substrate material, so that the loss of target blank components caused by molecular thermal motion is counteracted, and the indium gallium zinc oxide target material with uniform components is obtained through sintering.
本发明揭示了一种氧化铟镓锌靶材的制备方法，包括以下步骤：将氧化铟粉末、氧化镓粉末、氧化锌粉末加入球磨罐中，再加入分散剂、粘接剂以及纯水混合，进行预分散后得到混合液，将所述混合液进行湿法研磨后得到混合浆料；将混合浆料进行喷雾造粒、混料筛分，得到氧化铟镓锌粉末；将氧化铟镓锌粉末进行液压成型、冷等静压，得到氧化铟镓锌靶坯；将氧化铟镓锌靶坯进行烧结，烧结的过程中，在氧化铟镓锌靶坯底部铺上一层衬底材料，烧结完成后得到氧化铟镓锌靶材。本发明烧结过程中在靶坯底部铺上一层衬底材料，让靶坯在衬底材料的挥发氛围中烧结，从而抵消靶坯组分因为分子热运动导致的损失，烧结出组分均匀的氧化铟镓锌靶材。
Preparation method of indium gallium zinc oxide target material
The invention discloses a preparation method of an indium gallium zinc oxide target material. The preparation method comprises the following steps of: adding indium oxide powder, gallium oxide powderand zinc oxide powder into a ball milling tank, adding a dispersing agent, an adhesive and pure water, performing mixing, carrying out pre-dispersion to obtain a mixed solution, and carrying out wet grinding on the mixed solution to obtain a mixed slurry; carrying out spray granulation on the mixed slurry, performing mixing and screening to obtain indium gallium zinc oxide powder; carrying out hydraulic forming and isostatic cool pressing on the indium gallium zinc oxide powder to obtain an indium gallium zinc oxide target blank; and sintering the indium gallium zinc oxide target blank, in thesintering process, laying a layer of substrate material at the bottom of the indium gallium zinc oxide target blank, and obtaining the indium gallium zinc oxide target material after completing sintering. According to the preparation method of the indium gallium zinc oxide target material, in the sintering process, a layer of substrate material is laid at the bottom of the target blank, and the target blank is sintered in the volatilization atmosphere of the substrate material, so that the loss of target blank components caused by molecular thermal motion is counteracted, and the indium gallium zinc oxide target material with uniform components is obtained through sintering.
本发明揭示了一种氧化铟镓锌靶材的制备方法，包括以下步骤：将氧化铟粉末、氧化镓粉末、氧化锌粉末加入球磨罐中，再加入分散剂、粘接剂以及纯水混合，进行预分散后得到混合液，将所述混合液进行湿法研磨后得到混合浆料；将混合浆料进行喷雾造粒、混料筛分，得到氧化铟镓锌粉末；将氧化铟镓锌粉末进行液压成型、冷等静压，得到氧化铟镓锌靶坯；将氧化铟镓锌靶坯进行烧结，烧结的过程中，在氧化铟镓锌靶坯底部铺上一层衬底材料，烧结完成后得到氧化铟镓锌靶材。本发明烧结过程中在靶坯底部铺上一层衬底材料，让靶坯在衬底材料的挥发氛围中烧结，从而抵消靶坯组分因为分子热运动导致的损失，烧结出组分均匀的氧化铟镓锌靶材。
Preparation method of indium gallium zinc oxide target material
一种氧化铟镓锌靶材的制备方法
ZHANG LAIWEN (Autor:in) / SHAO XUELIANG (Autor:in) / LI KAIJIE (Autor:in) / ZHU LIU (Autor:in)
09.02.2021
Patent
Elektronische Ressource
Chinesisch
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