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Preparation method of high-density conductive niobium oxide target material
The invention relates to a preparation method of a high-density conductive niobium oxide target material, and relates to the technical field of material processing, and the preparation method comprises the following steps: S1, selecting niobium oxide powder and metal niobium powder as raw materials, and putting the niobium oxide powder and the metal niobium powder into a V-shaped mixer according to a ratio for mixing; S2, carrying out ball milling through a high-energy ball mill after the mixing is completed, S3, die filling the ball-milled powder; S4, performing hot pressing treatment to obtain a target material blank; S5, taking out the target material blank after cooling, and S6, processing the target material blank into a target material with a specified shape. According to the invention, the niobium oxide powder and the metal niobium powder are mixed and hot-pressed to prepare the target material, so that the effect of improving the conductivity of the target material is achieved.
本申请涉及一种高致密导电氧化铌靶材的制备方法,涉及材料加工技术的领域,其包括以下步骤:S1、选择氧化铌粉料和金属铌粉料作为原料按照配比放入V型混料机中混料,S2、混料完成后经高能球磨机进行球磨,S3、球磨好的粉料装模,S4、热压处理制得靶材坯料,S5、冷却后将靶材坯料取出,S6、将靶材坯料加工成规定形状的靶材。本申请具有通过氧化铌粉料和金属铌粉料混合热压制得靶材,从而提高靶材导电率的效果。
Preparation method of high-density conductive niobium oxide target material
The invention relates to a preparation method of a high-density conductive niobium oxide target material, and relates to the technical field of material processing, and the preparation method comprises the following steps: S1, selecting niobium oxide powder and metal niobium powder as raw materials, and putting the niobium oxide powder and the metal niobium powder into a V-shaped mixer according to a ratio for mixing; S2, carrying out ball milling through a high-energy ball mill after the mixing is completed, S3, die filling the ball-milled powder; S4, performing hot pressing treatment to obtain a target material blank; S5, taking out the target material blank after cooling, and S6, processing the target material blank into a target material with a specified shape. According to the invention, the niobium oxide powder and the metal niobium powder are mixed and hot-pressed to prepare the target material, so that the effect of improving the conductivity of the target material is achieved.
本申请涉及一种高致密导电氧化铌靶材的制备方法,涉及材料加工技术的领域,其包括以下步骤:S1、选择氧化铌粉料和金属铌粉料作为原料按照配比放入V型混料机中混料,S2、混料完成后经高能球磨机进行球磨,S3、球磨好的粉料装模,S4、热压处理制得靶材坯料,S5、冷却后将靶材坯料取出,S6、将靶材坯料加工成规定形状的靶材。本申请具有通过氧化铌粉料和金属铌粉料混合热压制得靶材,从而提高靶材导电率的效果。
Preparation method of high-density conductive niobium oxide target material
一种高致密导电氧化铌靶材的制备方法
SONG HAITAO (Autor:in) / SONG AIMOU (Autor:in)
02.04.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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