Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Production method of high-density conductive niobium oxide target
The invention belongs to the technical field of manufacturing of targets and in particular relates to a production method of a high-density conductive niobium oxide target. The production method of the high-density conductive niobium oxide target comprises the following steps: selecting niobium pentoxide powder and metal niobium powder as raw materials, adding the raw materials into a V-shaped mixer at a ratio, mixing the raw materials, putting the mixed powder raw materials into a high-energy ball milling tank for ball milling, putting the ball-milled powder into a high-purity graphite mould, putting the graphite mould into a hot pressing furnace for processing, turning off a power supply, cooling along with the furnace, taking out a target blank, processing the blank into a specifically-shaped target, and detecting the density, purity and resistivity of the target. According to the production method of the high-density conductive niobium oxide target, the distribution of the metal niobium is relatively uniform by virtue of a high-energy ball-milling mechanical alloying method; the conductivity of the target is relatively good; by virtue of an optimized hot pressing process, the production process is relatively short and the cost is relatively low; by virtue of optimization of the raw materials, the target is relatively good in conductivity and density.
Production method of high-density conductive niobium oxide target
The invention belongs to the technical field of manufacturing of targets and in particular relates to a production method of a high-density conductive niobium oxide target. The production method of the high-density conductive niobium oxide target comprises the following steps: selecting niobium pentoxide powder and metal niobium powder as raw materials, adding the raw materials into a V-shaped mixer at a ratio, mixing the raw materials, putting the mixed powder raw materials into a high-energy ball milling tank for ball milling, putting the ball-milled powder into a high-purity graphite mould, putting the graphite mould into a hot pressing furnace for processing, turning off a power supply, cooling along with the furnace, taking out a target blank, processing the blank into a specifically-shaped target, and detecting the density, purity and resistivity of the target. According to the production method of the high-density conductive niobium oxide target, the distribution of the metal niobium is relatively uniform by virtue of a high-energy ball-milling mechanical alloying method; the conductivity of the target is relatively good; by virtue of an optimized hot pressing process, the production process is relatively short and the cost is relatively low; by virtue of optimization of the raw materials, the target is relatively good in conductivity and density.
Production method of high-density conductive niobium oxide target
SONG AIMOU (Autor:in) / ZHONG XIAOLIANG (Autor:in)
08.04.2015
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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