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Preparation method of silicon nitride substrate raw material
The invention discloses a silicon nitride substrate raw material preparation method. The invention provides the silicon nitride substrate raw material preparation method, and the method comprises the steps: adding the additive into the silicon nitride raw powder, wherein the additive is a rare earth additive; fully mixing silicon nitride raw powder and the additive, and combusting the fused powder by using an atmosphere pressure sintering method, so the additive is released in the atmosphere pressure sintering process; therefore, the silicon nitride substrate prepared from the silicon nitride substrate raw material can meet the technological requirements of oversize, ultrathin thickness, high thermal conductivity and the like, and meanwhile, the mechanical property is ensured.
本发明公开一种氮化硅基板原料制备方法。本发明提供的一种氮化硅基板原料制备方法，通过向氮化硅原粉中加入添加剂，所述添加剂为稀土类添加剂。将所述氮化硅原粉与所述添加剂充分融合，利用气氛压力烧结法对融合后的粉末进行燃烧，使所述添加剂在气氛压力烧结过程中释放，从而使得本发明的氮化硅基板原料所能制备出的氮化硅基板在满足超大尺寸、超薄厚度、高导热率等工艺要求的同时保证机械性能。
Preparation method of silicon nitride substrate raw material
The invention discloses a silicon nitride substrate raw material preparation method. The invention provides the silicon nitride substrate raw material preparation method, and the method comprises the steps: adding the additive into the silicon nitride raw powder, wherein the additive is a rare earth additive; fully mixing silicon nitride raw powder and the additive, and combusting the fused powder by using an atmosphere pressure sintering method, so the additive is released in the atmosphere pressure sintering process; therefore, the silicon nitride substrate prepared from the silicon nitride substrate raw material can meet the technological requirements of oversize, ultrathin thickness, high thermal conductivity and the like, and meanwhile, the mechanical property is ensured.
本发明公开一种氮化硅基板原料制备方法。本发明提供的一种氮化硅基板原料制备方法，通过向氮化硅原粉中加入添加剂，所述添加剂为稀土类添加剂。将所述氮化硅原粉与所述添加剂充分融合，利用气氛压力烧结法对融合后的粉末进行燃烧，使所述添加剂在气氛压力烧结过程中释放，从而使得本发明的氮化硅基板原料所能制备出的氮化硅基板在满足超大尺寸、超薄厚度、高导热率等工艺要求的同时保证机械性能。
Preparation method of silicon nitride substrate raw material
一种氮化硅基板原料制备方法
BAI XIAOLONG (Autor:in)
04.06.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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