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PLZT ferroelectric film on flexible yttrium barium copper oxide/hastelloy substrate and preparation method of PLZT ferroelectric film
The invention discloses a PLZT ferroelectric film on a flexible yttrium barium copper oxide/hastelloy substrate and a preparation method of the PLZT ferroelectric film. The chemical formula of the PLZT ferroelectric film is Pb<1-x>La(ZrTi<1-y>)O<3>. The preparation method comprises the following steps: a, weighing lead acetate trihydrate (Pb(CH<3>COO)<2>. 3H<2>O), lanthanum nitrate (La(NO<3>)<3>), tetra-n-butyl titanate (Ti(OC<4>H<9>)<4>) and zirconium n-propoxide (Zr(OC<3>H<7>)<4>) according to a stoichiometric ratio, and dissolving the weighed substances in ethylene glycol monomethyl ether (2-MOE); b, adding deionized water and acetic acid into a mixed solution obtained in the step a to obtain PLZT sol; c, spin-coating a yttrium barium copper oxide/hastelloy substrate having been subjected to heat treatment with the PLZT sol to obtain a wet film; and d, drying the wet film obtained in the step c on a glue drying table, and then carrying out heat treatment to obtain the PLZT ferroelectric film. The PLZT/yttrium barium copper oxide/hastelloy multi-layer ferroelectric film provided by the invention is excellent in dielectric and ferroelectric properties, relatively high in deformability and excellent in application prospects in the field of flexible electronics.
本申请公开了一种柔性钇钡铜氧/哈氏合金衬底上PLZT铁电薄膜及其制备方法,其中PLZT铁电薄膜的化学式为:Pb1‑xLax(ZryTi1‑y)O3,制备方法包括如下步骤:a.将三水合乙酸铅(Pb(CH3COO)2·3H2O)、硝酸镧(La(NO3)3)、钛酸四正丁酯(Ti(OC4H9)4)和正丙醇锆(Zr(OC3H7)4)按照化学计量比称量,溶解于乙二醇甲醚(2‑MOE)之中;b.将步骤a所得的混合液加入去离子水和乙酸,得到PLZT溶胶;c.将所述PLZT溶胶旋涂在热处理后的钇钡铜氧/哈氏合金衬底上,得到湿膜;d.将步骤c所得湿膜置于烘胶台上干燥,随后进行热处理,得到PLZT铁电薄膜。本申请提供的PLZT/钇钡铜氧/哈氏合金多层铁电薄膜介电、铁电性能优异,具有较强的形变能力,在柔性电子领域具有优异的应用前景。
PLZT ferroelectric film on flexible yttrium barium copper oxide/hastelloy substrate and preparation method of PLZT ferroelectric film
The invention discloses a PLZT ferroelectric film on a flexible yttrium barium copper oxide/hastelloy substrate and a preparation method of the PLZT ferroelectric film. The chemical formula of the PLZT ferroelectric film is Pb<1-x>La(ZrTi<1-y>)O<3>. The preparation method comprises the following steps: a, weighing lead acetate trihydrate (Pb(CH<3>COO)<2>. 3H<2>O), lanthanum nitrate (La(NO<3>)<3>), tetra-n-butyl titanate (Ti(OC<4>H<9>)<4>) and zirconium n-propoxide (Zr(OC<3>H<7>)<4>) according to a stoichiometric ratio, and dissolving the weighed substances in ethylene glycol monomethyl ether (2-MOE); b, adding deionized water and acetic acid into a mixed solution obtained in the step a to obtain PLZT sol; c, spin-coating a yttrium barium copper oxide/hastelloy substrate having been subjected to heat treatment with the PLZT sol to obtain a wet film; and d, drying the wet film obtained in the step c on a glue drying table, and then carrying out heat treatment to obtain the PLZT ferroelectric film. The PLZT/yttrium barium copper oxide/hastelloy multi-layer ferroelectric film provided by the invention is excellent in dielectric and ferroelectric properties, relatively high in deformability and excellent in application prospects in the field of flexible electronics.
本申请公开了一种柔性钇钡铜氧/哈氏合金衬底上PLZT铁电薄膜及其制备方法,其中PLZT铁电薄膜的化学式为:Pb1‑xLax(ZryTi1‑y)O3,制备方法包括如下步骤:a.将三水合乙酸铅(Pb(CH3COO)2·3H2O)、硝酸镧(La(NO3)3)、钛酸四正丁酯(Ti(OC4H9)4)和正丙醇锆(Zr(OC3H7)4)按照化学计量比称量,溶解于乙二醇甲醚(2‑MOE)之中;b.将步骤a所得的混合液加入去离子水和乙酸,得到PLZT溶胶;c.将所述PLZT溶胶旋涂在热处理后的钇钡铜氧/哈氏合金衬底上,得到湿膜;d.将步骤c所得湿膜置于烘胶台上干燥,随后进行热处理,得到PLZT铁电薄膜。本申请提供的PLZT/钇钡铜氧/哈氏合金多层铁电薄膜介电、铁电性能优异,具有较强的形变能力,在柔性电子领域具有优异的应用前景。
PLZT ferroelectric film on flexible yttrium barium copper oxide/hastelloy substrate and preparation method of PLZT ferroelectric film
柔性钇钡铜氧/哈氏合金衬底上PLZT铁电薄膜及其制备方法
CHENG JINRONG (Autor:in) / ZHAI JIAN (Autor:in) / LU WENHUI (Autor:in) / CHEN JIANGUO (Autor:in)
16.07.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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