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Preparation method of SiC nanowire toughened HfC-SiC complex phase coating by chemical vapor co-deposition
The invention relates to a preparation method of a SiC nanowire toughened HfC-SiC complex phase coating by chemical vapor co-deposition. The preparation method adopts a three-step method and comprises the following steps: firstly, preparing a SiC inner coating by using an embedding method, then, introducing free silicon on the surface of the SiC inner coating by using a vapor siliconizing technology, carrying out chemical vapor deposition on HfC on the surface of a C/C sample with the SiC-SiC inner coating, and enhancing the interface bonding strength between the inner coating and the outer coating through in-situ reaction and diffusion of free silicon in the vapor deposition process. The SiC/HfC-SiC coating which is uniform in thickness, compact in structure, controllable in component and high in binding force can be prepared. On the basis of a mechanical bonding interface of a traditional method, an interface diffusion layer is introduced for diffusion to form diffusion bonding. And the coating process is simple, the reaction period is short, the cost is low, and the development prospect is wide.
本发明涉及一种SiC纳米线增韧化学气相共沉积HfC‑SiC复相涂层的制备方法，采用三步法，首先利用包埋法制备SiC内涂层，而后利用气相渗硅技术于SiC内涂层表面引入游离硅，最后在带有SiC‑SiC内涂层C/C试样表面化学气相沉积HfC，通过游离硅在气相沉积过程中的原位反应和扩散增强内外涂层间的界面结合强度。本发明可以制备出厚度均匀，结构致密，成分可控，结合力强的SiC/HfC‑SiC涂层。在传统方法的机械结合界面的基础上引入界面扩散层扩散，构成扩散结合。涂层工艺简单，反应周期短，成本低，具有广阔的发展前景。
Preparation method of SiC nanowire toughened HfC-SiC complex phase coating by chemical vapor co-deposition
The invention relates to a preparation method of a SiC nanowire toughened HfC-SiC complex phase coating by chemical vapor co-deposition. The preparation method adopts a three-step method and comprises the following steps: firstly, preparing a SiC inner coating by using an embedding method, then, introducing free silicon on the surface of the SiC inner coating by using a vapor siliconizing technology, carrying out chemical vapor deposition on HfC on the surface of a C/C sample with the SiC-SiC inner coating, and enhancing the interface bonding strength between the inner coating and the outer coating through in-situ reaction and diffusion of free silicon in the vapor deposition process. The SiC/HfC-SiC coating which is uniform in thickness, compact in structure, controllable in component and high in binding force can be prepared. On the basis of a mechanical bonding interface of a traditional method, an interface diffusion layer is introduced for diffusion to form diffusion bonding. And the coating process is simple, the reaction period is short, the cost is low, and the development prospect is wide.
本发明涉及一种SiC纳米线增韧化学气相共沉积HfC‑SiC复相涂层的制备方法，采用三步法，首先利用包埋法制备SiC内涂层，而后利用气相渗硅技术于SiC内涂层表面引入游离硅，最后在带有SiC‑SiC内涂层C/C试样表面化学气相沉积HfC，通过游离硅在气相沉积过程中的原位反应和扩散增强内外涂层间的界面结合强度。本发明可以制备出厚度均匀，结构致密，成分可控，结合力强的SiC/HfC‑SiC涂层。在传统方法的机械结合界面的基础上引入界面扩散层扩散，构成扩散结合。涂层工艺简单，反应周期短，成本低，具有广阔的发展前景。
Preparation method of SiC nanowire toughened HfC-SiC complex phase coating by chemical vapor co-deposition
一种SiC纳米线增韧化学气相共沉积HfC-SiC复相涂层的制备方法
FU QIANGANG (Autor:in) / TONG MINGDE (Autor:in) / FENG TAO (Autor:in)
03.09.2021
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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