Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention discloses a screen printing paste of an aluminum nitride ceramic substrate, the paste mainly comprises conductive phase powder, glass phase powder and an organic carrier, the glass phase powder comprises first glass powder and second glass powder, the particle size of the first glass powder is lower than that of the second glass powder, and the first glass powder is provided with an aluminum coating; the sintering temperature of the glass phase powder is 770-825 DEG C. According to the screen printing paste for the aluminum nitride ceramic substrate, distribution of the first glass powder and the second glass powder in the paste coating process and the flow difference in the sintering process are utilized, so that more first glass powder permeates into the aluminum nitride grain boundary of the substrate, and the interface of a glass phase and the substrate has no obvious bubble defect; and the bonding strength of a metallization layer and the substrate is improved. The invention further discloses a metallization method of the screen printing paste based on the aluminum nitride ceramic substrate.
本发明公开了一种氮化铝陶瓷基板的丝网印刷浆料，浆料的主要组成为导电相粉体、玻璃相粉体和有机载体，玻璃相粉体包含第一玻璃粉体和第二玻璃粉体，第一玻璃粉体的粒径小于第二玻璃粉体的粒径，第一玻璃粉体具有铝镀层；玻璃相粉体的烧结温度为770～825℃。本发明氮化铝陶瓷基板的丝网印刷浆料利用第一玻璃粉体和第二玻璃粉体在浆料涂覆过程中的分布以及烧结过程中的流动差异，促使第一玻璃粉体更多的渗入基板的氮化铝晶界之间，使得玻璃相与基板的界面处无明显的气泡缺陷，增加金属化层与基板的粘接强度。本发明还公开了一种基于氮化铝陶瓷基板丝网印刷浆料的金属化方法。
The invention discloses a screen printing paste of an aluminum nitride ceramic substrate, the paste mainly comprises conductive phase powder, glass phase powder and an organic carrier, the glass phase powder comprises first glass powder and second glass powder, the particle size of the first glass powder is lower than that of the second glass powder, and the first glass powder is provided with an aluminum coating; the sintering temperature of the glass phase powder is 770-825 DEG C. According to the screen printing paste for the aluminum nitride ceramic substrate, distribution of the first glass powder and the second glass powder in the paste coating process and the flow difference in the sintering process are utilized, so that more first glass powder permeates into the aluminum nitride grain boundary of the substrate, and the interface of a glass phase and the substrate has no obvious bubble defect; and the bonding strength of a metallization layer and the substrate is improved. The invention further discloses a metallization method of the screen printing paste based on the aluminum nitride ceramic substrate.
本发明公开了一种氮化铝陶瓷基板的丝网印刷浆料，浆料的主要组成为导电相粉体、玻璃相粉体和有机载体，玻璃相粉体包含第一玻璃粉体和第二玻璃粉体，第一玻璃粉体的粒径小于第二玻璃粉体的粒径，第一玻璃粉体具有铝镀层；玻璃相粉体的烧结温度为770～825℃。本发明氮化铝陶瓷基板的丝网印刷浆料利用第一玻璃粉体和第二玻璃粉体在浆料涂覆过程中的分布以及烧结过程中的流动差异，促使第一玻璃粉体更多的渗入基板的氮化铝晶界之间，使得玻璃相与基板的界面处无明显的气泡缺陷，增加金属化层与基板的粘接强度。本发明还公开了一种基于氮化铝陶瓷基板丝网印刷浆料的金属化方法。
Screen printing paste of aluminum nitride ceramic substrate and metallization method
一种氮化铝陶瓷基板的丝网印刷浆料及金属化方法
12.11.2021
Patent
Elektronische Ressource
Chinesisch
Aluminum nitride ceramic surface metallization method
| Europäisches Patentamt | 2022