Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Manufacturing method of silicon carbide micro-reaction assembly and silicon carbide micro-reaction assembly
The invention belongs to the technical field of micro-reaction assemblies, and particularly relates to a manufacturing method of a silicon carbide micro-reaction assembly and the silicon carbide micro-reaction assembly. The manufacturing method of the silicon carbide micro-reaction assembly comprises the following steps of (A) blank forming: adopting silicon carbide spray granulation powder, and directly performing isostatic pressing forming to obtain a blank, (B) plain blank processing: carrying out plane processing on the reaction plate plain blank according to a design size without processing a micro-channel, (C) high-temperature sintering: carrying out vacuum micro-negative pressure sintering on the plate obtained in the step (B), (D) processing a reaction plate: processing a micro-channel on the required reaction plate by laser, and carrying out finish machining on the feeding and discharging hole and the positioning hole, and (E) high-temperature welding: fixing the corrosion-resistant Hastelloy alloy foil between adjacent plates, and welding at the temperature of 1300-1400 DEG C and the pressure of 10-50 bar. The micro-channel of the reaction plate is obtained through laser processing after high-temperature sintering, accurate control can be achieved under the condition that the size of the micro-channel is very small, and micro-flow control is facilitated.
本申请属于微反应组件技术领域，具体涉及一种碳化硅微反应组件的制造方法及碳化硅微反应组件。碳化硅微反应组件的制造方法包括如下步骤：（A）素胚成型：采用碳化硅喷雾造粒粉体，直接等静压成型，得到素胚；（B）素胚加工：根据设计尺寸对反应板素胚进行平面加工，不加工微通道；（C）高温烧结：将步骤（B）获得的板进行真空微负压烧结；（D）反应板加工：在所需反应板上激光加工出微通道，并对进出料孔和定位孔进行精加工；（E）高温焊接：将耐腐蚀哈氏合金箔片固定于相邻的板之间，于1300‑1400℃和10‑50bar压力下焊接即可。本申请反应板的微通道是在高温烧结后通过激光加工获得，对于微通道尺寸非常小的情况，可实现精准控制，有助于微流量控制。
Manufacturing method of silicon carbide micro-reaction assembly and silicon carbide micro-reaction assembly
The invention belongs to the technical field of micro-reaction assemblies, and particularly relates to a manufacturing method of a silicon carbide micro-reaction assembly and the silicon carbide micro-reaction assembly. The manufacturing method of the silicon carbide micro-reaction assembly comprises the following steps of (A) blank forming: adopting silicon carbide spray granulation powder, and directly performing isostatic pressing forming to obtain a blank, (B) plain blank processing: carrying out plane processing on the reaction plate plain blank according to a design size without processing a micro-channel, (C) high-temperature sintering: carrying out vacuum micro-negative pressure sintering on the plate obtained in the step (B), (D) processing a reaction plate: processing a micro-channel on the required reaction plate by laser, and carrying out finish machining on the feeding and discharging hole and the positioning hole, and (E) high-temperature welding: fixing the corrosion-resistant Hastelloy alloy foil between adjacent plates, and welding at the temperature of 1300-1400 DEG C and the pressure of 10-50 bar. The micro-channel of the reaction plate is obtained through laser processing after high-temperature sintering, accurate control can be achieved under the condition that the size of the micro-channel is very small, and micro-flow control is facilitated.
本申请属于微反应组件技术领域，具体涉及一种碳化硅微反应组件的制造方法及碳化硅微反应组件。碳化硅微反应组件的制造方法包括如下步骤：（A）素胚成型：采用碳化硅喷雾造粒粉体，直接等静压成型，得到素胚；（B）素胚加工：根据设计尺寸对反应板素胚进行平面加工，不加工微通道；（C）高温烧结：将步骤（B）获得的板进行真空微负压烧结；（D）反应板加工：在所需反应板上激光加工出微通道，并对进出料孔和定位孔进行精加工；（E）高温焊接：将耐腐蚀哈氏合金箔片固定于相邻的板之间，于1300‑1400℃和10‑50bar压力下焊接即可。本申请反应板的微通道是在高温烧结后通过激光加工获得，对于微通道尺寸非常小的情况，可实现精准控制，有助于微流量控制。
Manufacturing method of silicon carbide micro-reaction assembly and silicon carbide micro-reaction assembly
一种碳化硅微反应组件的制造方法及碳化硅微反应组件
YAN YONGJIE (Autor:in) / YAO YUXI (Autor:in)
26.11.2021
Patent
Elektronische Ressource
Chinesisch
Low-temperature welding process of high-pressure-resistant silicon carbide micro-reaction assembly
| Europäisches Patentamt | 2021
| Europäisches Patentamt | 2020
METHOD FOR MANUFACTURING REACTION SINTERED SILICON CARBIDE MEMBER
| Europäisches Patentamt | 2016
Silicon carbide micro-powder for silicon carbide fine ceramics, and preparation method thereof
| Europäisches Patentamt | 2020