Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CVD system and method for preparing large-size carbon/carbon composite material
The invention provides a CVD system and a method for preparing a large-size carbon/carbon composite material. The system comprises a CVD furnace, the CVD furnace comprises a furnace body, a lower heating area, an upper heating area and a stock column set, the lower heating area and the upper heating area are arranged in the furnace body and communicate with each other, and the stock column set penetrates through the upper heating area and the lower heating area. A first heating cavity and a second heating cavity which are used for heating the upper heating area and the lower heating area respectively are formed in the side wall of the furnace body, a first preheating flow guiding mechanism and a first charging flow dividing mechanism which are sequentially arranged from bottom to top are arranged in the lower heating area, and an air supplementing structure and a second charging flow dividing mechanism are arranged in the upper heating area, and a nitrogen inlet communicated with the first heating cavity is formed in the side wall of the furnace body. Through layered guiding air inlet and layered preheating, the flow field is optimized, and the product quality uniformity is improved. In the CVD process, gas is controlled to flow directionally, and the carbon/carbon composite material of the large-size thermal field crucible is rapidly prepared by combining optimized temperature, pressure and gas flow rate control.
本发明提供了一种CVD系统及制备大尺寸炭/炭复合材料的方法，所述系统包括CVD气相沉积炉，所述CVD气相沉积炉包括炉体、设于炉体内相连通的下加热区及上加热区和贯穿于上下加热区内的料柱组，所述炉体的侧壁内设有分别对上下加热区加热的第一加热腔和第二加热腔，所述下加热区内设有由下到上依次设置的第一预热导流机构和第一装料分流机构，所述上加热区设有补气结构和第二装料分流机构，所述炉体侧壁设有与第一加热腔联通的氮气进气口。通过分层导向进气且分层预热，优化了流场，提高产品质量均一性。CVD过程中控制气体定向流动，结合优化的温度、压力和气体流速的控制，实现大尺寸热场坩埚炭/炭复合材料的快速制备。
CVD system and method for preparing large-size carbon/carbon composite material
The invention provides a CVD system and a method for preparing a large-size carbon/carbon composite material. The system comprises a CVD furnace, the CVD furnace comprises a furnace body, a lower heating area, an upper heating area and a stock column set, the lower heating area and the upper heating area are arranged in the furnace body and communicate with each other, and the stock column set penetrates through the upper heating area and the lower heating area. A first heating cavity and a second heating cavity which are used for heating the upper heating area and the lower heating area respectively are formed in the side wall of the furnace body, a first preheating flow guiding mechanism and a first charging flow dividing mechanism which are sequentially arranged from bottom to top are arranged in the lower heating area, and an air supplementing structure and a second charging flow dividing mechanism are arranged in the upper heating area, and a nitrogen inlet communicated with the first heating cavity is formed in the side wall of the furnace body. Through layered guiding air inlet and layered preheating, the flow field is optimized, and the product quality uniformity is improved. In the CVD process, gas is controlled to flow directionally, and the carbon/carbon composite material of the large-size thermal field crucible is rapidly prepared by combining optimized temperature, pressure and gas flow rate control.
本发明提供了一种CVD系统及制备大尺寸炭/炭复合材料的方法，所述系统包括CVD气相沉积炉，所述CVD气相沉积炉包括炉体、设于炉体内相连通的下加热区及上加热区和贯穿于上下加热区内的料柱组，所述炉体的侧壁内设有分别对上下加热区加热的第一加热腔和第二加热腔，所述下加热区内设有由下到上依次设置的第一预热导流机构和第一装料分流机构，所述上加热区设有补气结构和第二装料分流机构，所述炉体侧壁设有与第一加热腔联通的氮气进气口。通过分层导向进气且分层预热，优化了流场，提高产品质量均一性。CVD过程中控制气体定向流动，结合优化的温度、压力和气体流速的控制，实现大尺寸热场坩埚炭/炭复合材料的快速制备。
CVD system and method for preparing large-size carbon/carbon composite material
一种CVD系统及制备大尺寸炭／炭复合材料的方法
ZHANG JINGCAO (Autor:in) / LUO JUN (Autor:in) / WANG GANG (Autor:in) / TAO JUN (Autor:in)
01.02.2022
Patent
Elektronische Ressource
Chinesisch
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