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Preparation method of multilayer ceramic diffusion couple injected with metal ions
The invention discloses a preparation method of a multilayer ceramic deposition-metal diffusion couple injected with metal ions, and belongs to the technical field of material preparation. According to the scheme, the method comprises the steps that 1, a pyrolytic carbon layer and a cubic phase silicon carbide layer are sequentially deposited on the surface of a substrate through a chemical vapor deposition method; (2) depositing a silicon carbide sealing coating on the surface of the sample treated in the step (1) by adopting a pulse laser deposition method; and (3) injecting metal ions into the pyrolytic carbon layer of the sample treated in the step (2) by adopting an ion injection method to prepare the metal ion doped multilayer ceramic diffusion couple. According to the diffusion couple prepared through the method, combination between multiple layers of coatings, between the multiple layers of coatings and a silicon carbide sealing coating and between the multiple layers of coatings and a substrate is good, the solubility of metal elements for ion implantation in the coatings is moderate, and after treatment, the structural stability and metal ion inclusiveness of the diffusion couple under thermal annealing are obviously improved.
本发明公开了一种注入金属离子的多层陶瓷沉积‑金属扩散偶的制备方法，属于材料制备技术领域。采用的方案为：1)利用化学气相沉积法在衬底表面依次沉积热解碳层和立方相碳化硅层；2)采用脉冲激光沉积法在在经步骤1)处理后的样品的表面沉积一层碳化硅密封涂层；3)采用离子注入法将金属离子注入到经步骤2)处理后的样品的热解碳层中，制得金属离子掺杂的多层陶瓷扩散偶。经过本发明制备出的扩散偶的多层涂层之间，多层涂层与碳化硅密封涂层之间、多层涂层与衬底之间的结合良好，离子注入的金属元素在涂层中溶解度适中，处理后其在热退火下的结构稳定性和金属离子的包容性得到明显提高。
Preparation method of multilayer ceramic diffusion couple injected with metal ions
The invention discloses a preparation method of a multilayer ceramic deposition-metal diffusion couple injected with metal ions, and belongs to the technical field of material preparation. According to the scheme, the method comprises the steps that 1, a pyrolytic carbon layer and a cubic phase silicon carbide layer are sequentially deposited on the surface of a substrate through a chemical vapor deposition method; (2) depositing a silicon carbide sealing coating on the surface of the sample treated in the step (1) by adopting a pulse laser deposition method; and (3) injecting metal ions into the pyrolytic carbon layer of the sample treated in the step (2) by adopting an ion injection method to prepare the metal ion doped multilayer ceramic diffusion couple. According to the diffusion couple prepared through the method, combination between multiple layers of coatings, between the multiple layers of coatings and a silicon carbide sealing coating and between the multiple layers of coatings and a substrate is good, the solubility of metal elements for ion implantation in the coatings is moderate, and after treatment, the structural stability and metal ion inclusiveness of the diffusion couple under thermal annealing are obviously improved.
本发明公开了一种注入金属离子的多层陶瓷沉积‑金属扩散偶的制备方法，属于材料制备技术领域。采用的方案为：1)利用化学气相沉积法在衬底表面依次沉积热解碳层和立方相碳化硅层；2)采用脉冲激光沉积法在在经步骤1)处理后的样品的表面沉积一层碳化硅密封涂层；3)采用离子注入法将金属离子注入到经步骤2)处理后的样品的热解碳层中，制得金属离子掺杂的多层陶瓷扩散偶。经过本发明制备出的扩散偶的多层涂层之间，多层涂层与碳化硅密封涂层之间、多层涂层与衬底之间的结合良好，离子注入的金属元素在涂层中溶解度适中，处理后其在热退火下的结构稳定性和金属离子的包容性得到明显提高。
Preparation method of multilayer ceramic diffusion couple injected with metal ions
一种注入金属离子的多层陶瓷扩散偶的制备方法
ZHANG QINGMIN (Autor:in) / CAI ZIQI (Autor:in) / SHAO ZHUANG (Autor:in) / ZHU KANGFU (Autor:in) / GUO YUHANG (Autor:in)
15.04.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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