Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for recycling ITO (indium tin oxide) target waste
The invention provides a method for recycling ITO (indium tin oxide) target waste, which mainly comprises the following steps: recycling the ITO waste with the indium oxide content of 90-95%, screening ITO powder, and carrying out ball milling on the powder with the particle size of less than 1mm and indium oxide to produce the ITO target with the low content of tin dioxide. According to the method, the process of converting the waste into metal indium and then producing the metal indium into indium oxide is omitted, and the production cost is greatly reduced. The low-content tin dioxide ITO target material, such as a 97/3 ITO target material, is produced through ball milling, the relative density of the produced 97/3 target material can reach 99.7%, and the grain size is 10 microns. According to the technology, a recovered powder degreasing procedure and a direct emulsifying and sanding procedure are omitted, and a waste recovery procedure is shortened, so that the production cost is reduced, and the economic benefit is improved.
本发明提供一种ITO靶材废料的回收利用方法，本发明主要是回收氧化铟含量90～95％的ITO废料，将ITO粉进行筛分，小于1mm的粉料和氧化铟进行球磨生产低含量二氧化锡的ITO靶材。该方法略去了将废料转化成金属铟，再生产成氧化铟的过程，大大降低了生产成本。本发明经过球磨生产低含量二氧化锡的ITO靶材，如97/3的ITO靶材，生产的97/3靶材相对密度可以达到99.7％，晶粒尺寸在10μm。本技术去除了回收粉末脱脂工序，直接乳化砂磨，缩短废料的回收工序，从而降低生产成本，提高了经济效益。
Method for recycling ITO (indium tin oxide) target waste
The invention provides a method for recycling ITO (indium tin oxide) target waste, which mainly comprises the following steps: recycling the ITO waste with the indium oxide content of 90-95%, screening ITO powder, and carrying out ball milling on the powder with the particle size of less than 1mm and indium oxide to produce the ITO target with the low content of tin dioxide. According to the method, the process of converting the waste into metal indium and then producing the metal indium into indium oxide is omitted, and the production cost is greatly reduced. The low-content tin dioxide ITO target material, such as a 97/3 ITO target material, is produced through ball milling, the relative density of the produced 97/3 target material can reach 99.7%, and the grain size is 10 microns. According to the technology, a recovered powder degreasing procedure and a direct emulsifying and sanding procedure are omitted, and a waste recovery procedure is shortened, so that the production cost is reduced, and the economic benefit is improved.
本发明提供一种ITO靶材废料的回收利用方法，本发明主要是回收氧化铟含量90～95％的ITO废料，将ITO粉进行筛分，小于1mm的粉料和氧化铟进行球磨生产低含量二氧化锡的ITO靶材。该方法略去了将废料转化成金属铟，再生产成氧化铟的过程，大大降低了生产成本。本发明经过球磨生产低含量二氧化锡的ITO靶材，如97/3的ITO靶材，生产的97/3靶材相对密度可以达到99.7％，晶粒尺寸在10μm。本技术去除了回收粉末脱脂工序，直接乳化砂磨，缩短废料的回收工序，从而降低生产成本，提高了经济效益。
Method for recycling ITO (indium tin oxide) target waste
一种ITO靶材废料的回收利用方法
LIU WENJIE (Autor:in) / WEN JIE (Autor:in) / ZHONG XIAOHUA (Autor:in) / TONG PEIYUN (Autor:in) / ZHU LIU (Autor:in)
29.04.2022
Patent
Elektronische Ressource
Chinesisch
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