Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Target material prepared by recycling waste ITO (indium tin oxide) target and method
The invention belongs to the technical field of target material recycling, and discloses a method for preparing a target material by recycling an ITO waste target, which comprises the following steps: pickling the ITO waste target, heating, evaporating, cooling and collecting powder to obtain powder, mixing the powder with pure water in a mass ratio of (0.4-0.6): 1, grinding to obtain slurry I, adding an adhesive into the slurry I, and stirring to obtain slurry II; the ratio of the addition amount of the adhesive to the mass of the first slurry is (2-5): 100, finally, the second slurry is subjected to spray granulation, pressing and sintering, the ITO waste target recycling and re-preparing target material is obtained, the ITO waste target recycling and re-preparing target material prepared through the method has the high relative density and electrical resistivity on the basis of the low cracking rate, and in addition, the target material can be used for recycling and re-preparing the ITO waste target. The invention further discloses a target material prepared by recycling the ITO waste target.
本申请属于靶材再回收利用技术领域，公开了一种ITO废靶回收再制备靶材的方法，该方法先将ITO废靶酸洗、加热蒸发、冷却、收粉，得到粉体，再将粉体与纯水混合、研磨，得到浆料一，其中粉体与纯水的质量比为0.4～0.6：1，随后向浆料一中加入粘合剂并搅拌，搅拌后得到浆料二，其中粘合剂的添加量与浆料一的质量比为2～5：100，最后将浆料二喷雾造粒、压制、烧结，得到ITO废靶回收再制备靶材，通过上述方法制备的ITO废靶回收再制备靶材在具有较低的开裂率的基础上，还具有较高的相对密度和电阻率，此外，本申请还公开了一种ITO废靶回收再制备靶材。
Target material prepared by recycling waste ITO (indium tin oxide) target and method
The invention belongs to the technical field of target material recycling, and discloses a method for preparing a target material by recycling an ITO waste target, which comprises the following steps: pickling the ITO waste target, heating, evaporating, cooling and collecting powder to obtain powder, mixing the powder with pure water in a mass ratio of (0.4-0.6): 1, grinding to obtain slurry I, adding an adhesive into the slurry I, and stirring to obtain slurry II; the ratio of the addition amount of the adhesive to the mass of the first slurry is (2-5): 100, finally, the second slurry is subjected to spray granulation, pressing and sintering, the ITO waste target recycling and re-preparing target material is obtained, the ITO waste target recycling and re-preparing target material prepared through the method has the high relative density and electrical resistivity on the basis of the low cracking rate, and in addition, the target material can be used for recycling and re-preparing the ITO waste target. The invention further discloses a target material prepared by recycling the ITO waste target.
本申请属于靶材再回收利用技术领域，公开了一种ITO废靶回收再制备靶材的方法，该方法先将ITO废靶酸洗、加热蒸发、冷却、收粉，得到粉体，再将粉体与纯水混合、研磨，得到浆料一，其中粉体与纯水的质量比为0.4～0.6：1，随后向浆料一中加入粘合剂并搅拌，搅拌后得到浆料二，其中粘合剂的添加量与浆料一的质量比为2～5：100，最后将浆料二喷雾造粒、压制、烧结，得到ITO废靶回收再制备靶材，通过上述方法制备的ITO废靶回收再制备靶材在具有较低的开裂率的基础上，还具有较高的相对密度和电阻率，此外，本申请还公开了一种ITO废靶回收再制备靶材。
Target material prepared by recycling waste ITO (indium tin oxide) target and method
一种ITO废靶回收再制备靶材及方法
YANG XIUTIAN (Autor:in) / LEE JIN SEUNG (Autor:in) / XIE XIAOLIN (Autor:in) / LIANG ZHAOKE (Autor:in) / GAN YU (Autor:in)
29.03.2024
Patent
Elektronische Ressource
Chinesisch
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