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The invention provides a silicon nitride microcrystalline plate and a production process thereof, and relates to the technical field of silicon nitride microcrystalline plate production processes. According to the silicon nitride microcrystalline plate and the production process thereof, the composition of the silicon nitride microcrystalline plate contains S < i > Cgt; the preparation method comprises the following steps: taking 98% of coarse, medium and fine particles S < i > C and industrial silicon powder containing S < i > of more than 98%, particles of less than 10 [mu] m and the maximum particle of not more than 20 [mu] m as raw materials, and S1, preparing S < i >-containing Cgt; the preparation method comprises the following steps: proportioning the following raw materials in percentage by weight: 98% of coarse, medium and fine particles S < i > C and industrial silicon powder containing more than 98% of S < i >, less than 10 [mu] m and not more than 20 [mu] m to obtain a mixed material; on the basis of controlling raw materials required by production of the silicon nitride microcrystal plate, each production process flow of the silicon nitride microcrystal plate from burdening, mixing, forming, drying, sintering and detecting is strictly controlled, so that the sintering difficulty of the silicon nitride microcrystal plate is reduced, unstable variable factors existing in the production process are also greatly avoided, and the production efficiency of the silicon nitride microcrystal plate is improved. The yield increasing benefit and the energy-saving and consumption-reducing benefit are favorably improved.
本发明提供氮化硅微晶板及其生产工艺,涉及氮化硅微晶板生产工艺技术领域。该氮化硅微晶板及其生产工艺,其组成为含S i C>98%的粗、中、细颗粒S i C和含S i大于98%,颗粒小于10μm,且颗粒最大不大于20μm的工业硅粉为原料,包括以下步骤:S1.准备好含S i C>98%的粗、中、细颗粒S i C和含S i大于98%,颗粒小于10μm,且颗粒最大不大于20μm的工业硅粉,进行配料,得到混料。通过控制氮化硅微晶板生产所需的原材料的基础上、严格把控氮化硅微晶板从配料、混料、成型、干燥、烧成和检测的每一个生产工艺流程,既缩减了其烧结的难度,也极大避免生产工艺中存在的不稳定变量因素,有利于提高增产效益和节能降耗效益。
The invention provides a silicon nitride microcrystalline plate and a production process thereof, and relates to the technical field of silicon nitride microcrystalline plate production processes. According to the silicon nitride microcrystalline plate and the production process thereof, the composition of the silicon nitride microcrystalline plate contains S < i > Cgt; the preparation method comprises the following steps: taking 98% of coarse, medium and fine particles S < i > C and industrial silicon powder containing S < i > of more than 98%, particles of less than 10 [mu] m and the maximum particle of not more than 20 [mu] m as raw materials, and S1, preparing S < i >-containing Cgt; the preparation method comprises the following steps: proportioning the following raw materials in percentage by weight: 98% of coarse, medium and fine particles S < i > C and industrial silicon powder containing more than 98% of S < i >, less than 10 [mu] m and not more than 20 [mu] m to obtain a mixed material; on the basis of controlling raw materials required by production of the silicon nitride microcrystal plate, each production process flow of the silicon nitride microcrystal plate from burdening, mixing, forming, drying, sintering and detecting is strictly controlled, so that the sintering difficulty of the silicon nitride microcrystal plate is reduced, unstable variable factors existing in the production process are also greatly avoided, and the production efficiency of the silicon nitride microcrystal plate is improved. The yield increasing benefit and the energy-saving and consumption-reducing benefit are favorably improved.
本发明提供氮化硅微晶板及其生产工艺,涉及氮化硅微晶板生产工艺技术领域。该氮化硅微晶板及其生产工艺,其组成为含S i C>98%的粗、中、细颗粒S i C和含S i大于98%,颗粒小于10μm,且颗粒最大不大于20μm的工业硅粉为原料,包括以下步骤:S1.准备好含S i C>98%的粗、中、细颗粒S i C和含S i大于98%,颗粒小于10μm,且颗粒最大不大于20μm的工业硅粉,进行配料,得到混料。通过控制氮化硅微晶板生产所需的原材料的基础上、严格把控氮化硅微晶板从配料、混料、成型、干燥、烧成和检测的每一个生产工艺流程,既缩减了其烧结的难度,也极大避免生产工艺中存在的不稳定变量因素,有利于提高增产效益和节能降耗效益。
Silicon nitride microcrystalline plate and production process thereof
氮化硅微晶板及其生产工艺
22.11.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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