Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
The invention belongs to the technical field of high-purity graphite fiber heat-insulation composite materials, and particularly relates to a high-purity graphite fiber heat-insulation composite material for a semiconductor and a preparation method of the high-purity graphite fiber heat-insulation composite material. Comprising carbon fibers and an adhesive, the carbon fiber filaments are arranged according to a preset direction; the density of graphite fibers formed after the carbon fibers are subjected to graphitization treatment is gradually reduced from inside to outside according to a preset condition; the adhesive is phenolic resin, and the adhesive is liquid and/or powder; and more than 90% of the graphite fibers are arranged along the circumferential direction of the product or parallel to the axial direction of the graphite fiber cylinder product. The technical problems that thermal field thermal insulation materials in existing semiconductor silicon crystal bars and silicon carbide crystal bars are low in purity and poor in thermal insulation effect are solved.
本发明属于高纯石墨纤维隔热复合材料技术领域，特别是涉及一种高纯半导体用石墨纤维隔热复合材料及其制备方法。包括，碳纤维丝和粘合剂；所述碳纤维丝按照预设方向排列；碳纤维丝经过石墨化处理后形成的石墨纤维丝密度按照预设从内到外逐渐减小；所述粘合剂为酚醛树脂，所述粘合剂为液体和/或粉剂；所述石墨纤维丝90％以上沿产品圆周方向或平行于石墨纤维圆筒产品轴方向排列。解决了现有半导体硅晶棒和碳化硅晶棒中热场隔热材料纯度低，隔热效果差的技术问题。
The invention belongs to the technical field of high-purity graphite fiber heat-insulation composite materials, and particularly relates to a high-purity graphite fiber heat-insulation composite material for a semiconductor and a preparation method of the high-purity graphite fiber heat-insulation composite material. Comprising carbon fibers and an adhesive, the carbon fiber filaments are arranged according to a preset direction; the density of graphite fibers formed after the carbon fibers are subjected to graphitization treatment is gradually reduced from inside to outside according to a preset condition; the adhesive is phenolic resin, and the adhesive is liquid and/or powder; and more than 90% of the graphite fibers are arranged along the circumferential direction of the product or parallel to the axial direction of the graphite fiber cylinder product. The technical problems that thermal field thermal insulation materials in existing semiconductor silicon crystal bars and silicon carbide crystal bars are low in purity and poor in thermal insulation effect are solved.
本发明属于高纯石墨纤维隔热复合材料技术领域，特别是涉及一种高纯半导体用石墨纤维隔热复合材料及其制备方法。包括，碳纤维丝和粘合剂；所述碳纤维丝按照预设方向排列；碳纤维丝经过石墨化处理后形成的石墨纤维丝密度按照预设从内到外逐渐减小；所述粘合剂为酚醛树脂，所述粘合剂为液体和/或粉剂；所述石墨纤维丝90％以上沿产品圆周方向或平行于石墨纤维圆筒产品轴方向排列。解决了现有半导体硅晶棒和碳化硅晶棒中热场隔热材料纯度低，隔热效果差的技术问题。
Graphite fiber heat insulation composite material for high-purity semiconductor and preparation method of graphite fiber heat insulation composite material
一种高纯半导体用石墨纤维隔热复合材料及其制备方法
SHAN JIAN (Autor:in)
29.11.2022
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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