Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Electrostatic chuck, substrate fixing device and manufacturing method of electrostatic chuck
The invention relates to an electrostatic chuck, a substrate fixing device and a manufacturing method of the electrostatic chuck. The electrostatic chuck includes: an insulating substrate having a placement surface on which a suction target object is placed and an opposite surface provided on an opposite side of the placement surface; and an air hole penetrating from the opposite surface to the placement surface. The air hole has a first hole portion extending from the opposite surface toward the placement surface, a second hole portion extending from the placement surface toward the opposite surface, and a third hole portion provided between the first hole portion and the second hole portion and formed to communicate the first hole portion and the second hole portion with each other. The first hole portion is provided so as not to overlap with the second hole portion in plan view.
本发明涉及静电吸盘、基板固定装置和静电吸盘的制造方法。该静电吸盘包括：绝缘基板，其具有放置吸附目标对象的放置表面和设置在放置表面的相反侧的相反表面；以及气孔，其从相反表面穿透至放置表面。气孔具有从相反表面朝向放置表面延伸的第一孔部、从放置表面朝向相反表面延伸的第二孔部、以及设置在第一孔部和第二孔部之间并且形成为使第一孔部和第二孔部彼此连通的第三孔部。第一孔部设置为在俯视时不与第二孔部重叠。
Electrostatic chuck, substrate fixing device and manufacturing method of electrostatic chuck
The invention relates to an electrostatic chuck, a substrate fixing device and a manufacturing method of the electrostatic chuck. The electrostatic chuck includes: an insulating substrate having a placement surface on which a suction target object is placed and an opposite surface provided on an opposite side of the placement surface; and an air hole penetrating from the opposite surface to the placement surface. The air hole has a first hole portion extending from the opposite surface toward the placement surface, a second hole portion extending from the placement surface toward the opposite surface, and a third hole portion provided between the first hole portion and the second hole portion and formed to communicate the first hole portion and the second hole portion with each other. The first hole portion is provided so as not to overlap with the second hole portion in plan view.
本发明涉及静电吸盘、基板固定装置和静电吸盘的制造方法。该静电吸盘包括：绝缘基板，其具有放置吸附目标对象的放置表面和设置在放置表面的相反侧的相反表面；以及气孔，其从相反表面穿透至放置表面。气孔具有从相反表面朝向放置表面延伸的第一孔部、从放置表面朝向相反表面延伸的第二孔部、以及设置在第一孔部和第二孔部之间并且形成为使第一孔部和第二孔部彼此连通的第三孔部。第一孔部设置为在俯视时不与第二孔部重叠。
Electrostatic chuck, substrate fixing device and manufacturing method of electrostatic chuck
静电吸盘、基板固定装置和静电吸盘的制造方法
KOBAYASHI KENTARO (Autor:in) / WATANABE MIZUKI (Autor:in) / YAMAGUCHI KOHEI (Autor:in) / SATO ATSUO (Autor:in)
03.02.2023
Patent
Elektronische Ressource
Chinesisch
| Europäisches Patentamt | 2024
| Europäisches Patentamt | 2024