Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Electrostatic chuck component, electrostatic chuck device, and method for manufacturing electrostatic chuck component
An electrostatic chuck component is provided with: a dielectric substrate provided with a mounting surface on which a sample is mounted and having a direction orthogonal to the mounting surface as a thickness direction; and an adsorption electrode embedded in the interior of the dielectric substrate, in which a gas flow path extending in the plane direction of the placement surface is provided in the interior of the dielectric substrate, and the inner side surface of the gas flow path has: a bottom surface section facing the same direction as the placement surface; a top surface portion facing the bottom surface portion; and a pair of side surface portions connecting the bottom surface portion and the top surface portion, at least one of the pair of side surface portions being inclined with respect to the thickness direction.
一种静电卡盘部件，其具备：电介质基板，设置有搭载试样的载置面且将与载置面正交的方向设为厚度方向；及吸附电极，嵌入于电介质基板的内部，其中，在电介质基板的内部设置有沿载置面的平面方向延伸的气体流路，气体流路的内侧面具有：底面部，朝向与载置面相同的方向；顶面部，与底面部对置；及一对侧面部，连接底面部和顶面部，一对侧面部中的至少一个相对于厚度方向倾斜。
Electrostatic chuck component, electrostatic chuck device, and method for manufacturing electrostatic chuck component
An electrostatic chuck component is provided with: a dielectric substrate provided with a mounting surface on which a sample is mounted and having a direction orthogonal to the mounting surface as a thickness direction; and an adsorption electrode embedded in the interior of the dielectric substrate, in which a gas flow path extending in the plane direction of the placement surface is provided in the interior of the dielectric substrate, and the inner side surface of the gas flow path has: a bottom surface section facing the same direction as the placement surface; a top surface portion facing the bottom surface portion; and a pair of side surface portions connecting the bottom surface portion and the top surface portion, at least one of the pair of side surface portions being inclined with respect to the thickness direction.
一种静电卡盘部件，其具备：电介质基板，设置有搭载试样的载置面且将与载置面正交的方向设为厚度方向；及吸附电极，嵌入于电介质基板的内部，其中，在电介质基板的内部设置有沿载置面的平面方向延伸的气体流路，气体流路的内侧面具有：底面部，朝向与载置面相同的方向；顶面部，与底面部对置；及一对侧面部，连接底面部和顶面部，一对侧面部中的至少一个相对于厚度方向倾斜。
Electrostatic chuck component, electrostatic chuck device, and method for manufacturing electrostatic chuck component
静电卡盘部件、静电卡盘装置及静电卡盘部件的制造方法
ICHIYOSHI TAKU (Autor:in) / INUI TOSHIYOSHI (Autor:in) / OTSUKA TAKESHI (Autor:in)
16.07.2024
Patent
Elektronische Ressource
Chinesisch
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