Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of unbonded-phase tungsten carbide target material
The invention relates to a preparation method of a binding-phase-free tungsten carbide target material. The preparation method is characterized by comprising the following steps: (1) selecting tungsten carbide; (2) wet grinding: carrying out wet grinding homogenization on the mixture by adopting a heptane wet grinding process; (3) wet grinding material drying: drying and sieving the raw materials subjected to wet grinding; (4) carrying out low-temperature pressure sintering and preforming; (5) high-temperature air pressure sintering densification; (6) grinding: grinding the sintered target material blank into a qualified target material by using a diamond grinding wheel; (7) detecting: detecting the appearance size, form and location tolerance and surface smoothness of the target material subjected to fine grinding; and (8) packaging: detecting a qualified target material after grinding, and packaging the qualified target material in a vacuum bag.
一种无粘结相碳化钨靶材制备方法，其特征在于：包括以下步骤：(1)选择碳化钨；(2)湿磨：采用庚烷湿磨工艺对混合料湿磨均匀化；(3)湿磨料干燥：将湿磨后的原料进行干燥和过筛；(4)低温压烧预成型；(5)高温气压烧结致密化；(6)磨加工：经过烧结的靶材毛坯使用金刚石砂轮进行磨加工成为合格靶材；(7)检测：对精磨加工的靶材进行外观尺寸、形位公差、表面光洁度检测；(8)包装：磨加工后检测合格靶材，装入真空袋进行包装。
Preparation method of unbonded-phase tungsten carbide target material
The invention relates to a preparation method of a binding-phase-free tungsten carbide target material. The preparation method is characterized by comprising the following steps: (1) selecting tungsten carbide; (2) wet grinding: carrying out wet grinding homogenization on the mixture by adopting a heptane wet grinding process; (3) wet grinding material drying: drying and sieving the raw materials subjected to wet grinding; (4) carrying out low-temperature pressure sintering and preforming; (5) high-temperature air pressure sintering densification; (6) grinding: grinding the sintered target material blank into a qualified target material by using a diamond grinding wheel; (7) detecting: detecting the appearance size, form and location tolerance and surface smoothness of the target material subjected to fine grinding; and (8) packaging: detecting a qualified target material after grinding, and packaging the qualified target material in a vacuum bag.
一种无粘结相碳化钨靶材制备方法，其特征在于：包括以下步骤：(1)选择碳化钨；(2)湿磨：采用庚烷湿磨工艺对混合料湿磨均匀化；(3)湿磨料干燥：将湿磨后的原料进行干燥和过筛；(4)低温压烧预成型；(5)高温气压烧结致密化；(6)磨加工：经过烧结的靶材毛坯使用金刚石砂轮进行磨加工成为合格靶材；(7)检测：对精磨加工的靶材进行外观尺寸、形位公差、表面光洁度检测；(8)包装：磨加工后检测合格靶材，装入真空袋进行包装。
Preparation method of unbonded-phase tungsten carbide target material
一种无粘结相碳化钨靶材制备方法
WU XIAOHUI (Autor:in) / LUO YANDONG (Autor:in)
07.04.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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