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Method for preparing aluminum nitride powder by using sand mill and aluminum nitride powder
The invention discloses a method for preparing aluminum nitride powder through a sand mill and the aluminum nitride powder, and belongs to the field of semiconductor material processing.The method comprises the following steps that an aluminum nitride raw material is pretreated to the micron order through a first sand mill; a second sand mill is used for pre-treating the sintering aid to the nanoscale; mixing a micron-sized aluminum nitride raw material and a nano-sized sintering aid by using a third sand mill to obtain slurry; and sequentially carrying out spray drying and spray granulation on the slurry, and then carrying out heat treatment to obtain the aluminum nitride powder. The process is improved, the particle size of the raw materials is reduced and the particle size distribution is narrowed through the nano sand mill, so that the aluminum nitride powder with high purity, strong dispersion and uniform particle size can be obtained, the thermal conductivity of the aluminum nitride powder can be further improved, and the cost is reduced.
本发明公开了一种利用砂磨机制备氮化铝粉体的方法及氮化铝粉体，其属于半导体材料加工领域，其中，该方法包括以下步骤：利用第一砂磨机将氮化铝原料预处理至微米级；利用第二砂磨机将烧结助剂预处理至纳米级；利用第三砂磨机将微米级的氮化铝原料和纳米级的烧结助剂进行混合，得到浆料；将上述浆料依次进行喷雾干燥和喷雾造粒后，再进行热处理，得到所述氮化铝粉体。本发明通过纳米砂磨机改善工艺，降低原料粒径，窄化粒度分布，可以获得高纯度、强分散、粒径均匀的氮化铝粉体，进而可以提高氮化铝粉体的导热率，降低成本。
Method for preparing aluminum nitride powder by using sand mill and aluminum nitride powder
The invention discloses a method for preparing aluminum nitride powder through a sand mill and the aluminum nitride powder, and belongs to the field of semiconductor material processing.The method comprises the following steps that an aluminum nitride raw material is pretreated to the micron order through a first sand mill; a second sand mill is used for pre-treating the sintering aid to the nanoscale; mixing a micron-sized aluminum nitride raw material and a nano-sized sintering aid by using a third sand mill to obtain slurry; and sequentially carrying out spray drying and spray granulation on the slurry, and then carrying out heat treatment to obtain the aluminum nitride powder. The process is improved, the particle size of the raw materials is reduced and the particle size distribution is narrowed through the nano sand mill, so that the aluminum nitride powder with high purity, strong dispersion and uniform particle size can be obtained, the thermal conductivity of the aluminum nitride powder can be further improved, and the cost is reduced.
本发明公开了一种利用砂磨机制备氮化铝粉体的方法及氮化铝粉体，其属于半导体材料加工领域，其中，该方法包括以下步骤：利用第一砂磨机将氮化铝原料预处理至微米级；利用第二砂磨机将烧结助剂预处理至纳米级；利用第三砂磨机将微米级的氮化铝原料和纳米级的烧结助剂进行混合，得到浆料；将上述浆料依次进行喷雾干燥和喷雾造粒后，再进行热处理，得到所述氮化铝粉体。本发明通过纳米砂磨机改善工艺，降低原料粒径，窄化粒度分布，可以获得高纯度、强分散、粒径均匀的氮化铝粉体，进而可以提高氮化铝粉体的导热率，降低成本。
Method for preparing aluminum nitride powder by using sand mill and aluminum nitride powder
一种利用砂磨机制备氮化铝粉体的方法及氮化铝粉体
LI YUANLIN (Autor:in) / LIU MING (Autor:in) / ZHAO YANAN (Autor:in) / PENG BIN (Autor:in) / GONG BENLI (Autor:in)
16.05.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
Preparation method of aluminum nitride powder and aluminum nitride powder
| Europäisches Patentamt | 2024
Preparation method of aluminum nitride powder and aluminum nitride powder
| Europäisches Patentamt | 2024