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Device for preparing ceramic powder
The device for preparing the ceramic powder comprises a reaction cavity; the plasma generation cavity is positioned at the top of the reaction cavity and is communicated with the reaction cavity; the crucible is positioned at the bottom in the reaction cavity and is used for bearing a reaction material; the feeding pipe penetrates through the top of the plasma generation cavity and extends into the plasma generation cavity, and the feeding pipe is used for conveying reaction materials into the crucible; the high-frequency power supply is electrically connected with the plasma generation cavity, and the high-frequency power supply is used for generating plasma in the plasma generation cavity; the settling chamber is communicated with the reaction cavity; the collecting tank is positioned at the bottom of the settling chamber and is communicated with the settling chamber; the vacuum pump is communicated with the settling chamber and is used for keeping the reaction cavity in a vacuum state. The aluminum nitride nanoparticles prepared by the device are small in granularity and high in purity, and can meet the raw material requirements of high-requirement devices; and meanwhile, the device can realize continuous production and is high in production efficiency and safety.
一种制备陶瓷粉末的装置,包括:反应腔;位于反应腔顶部的等离子体发生腔,所述等离子体发生腔与反应腔相连通;位于反应腔内底部的坩埚,所述坩埚用于承载反应物料;从等离子体发生腔顶部贯穿并延伸至等离子体发生腔内的进料管,所述进料管用于向坩埚内传输反应物料;高频电源,所述高频电源与等离子体发生腔电连接,所述高频电源用于在等离子体发生腔内生成等离子体;与反应腔相连通的沉降室;位于沉降室底部的收集罐,所述收集罐与沉降室相连通;与沉降室相连通的真空泵,所述真空泵用于使反应腔保持真空状态。所述装置制备的氮化铝纳米颗粒粒度小、纯度高,能够满足高要求器件的原材料需要;同时所述装置能够连续生产,生产效率和安全性高。
Device for preparing ceramic powder
The device for preparing the ceramic powder comprises a reaction cavity; the plasma generation cavity is positioned at the top of the reaction cavity and is communicated with the reaction cavity; the crucible is positioned at the bottom in the reaction cavity and is used for bearing a reaction material; the feeding pipe penetrates through the top of the plasma generation cavity and extends into the plasma generation cavity, and the feeding pipe is used for conveying reaction materials into the crucible; the high-frequency power supply is electrically connected with the plasma generation cavity, and the high-frequency power supply is used for generating plasma in the plasma generation cavity; the settling chamber is communicated with the reaction cavity; the collecting tank is positioned at the bottom of the settling chamber and is communicated with the settling chamber; the vacuum pump is communicated with the settling chamber and is used for keeping the reaction cavity in a vacuum state. The aluminum nitride nanoparticles prepared by the device are small in granularity and high in purity, and can meet the raw material requirements of high-requirement devices; and meanwhile, the device can realize continuous production and is high in production efficiency and safety.
一种制备陶瓷粉末的装置,包括:反应腔;位于反应腔顶部的等离子体发生腔,所述等离子体发生腔与反应腔相连通;位于反应腔内底部的坩埚,所述坩埚用于承载反应物料;从等离子体发生腔顶部贯穿并延伸至等离子体发生腔内的进料管,所述进料管用于向坩埚内传输反应物料;高频电源,所述高频电源与等离子体发生腔电连接,所述高频电源用于在等离子体发生腔内生成等离子体;与反应腔相连通的沉降室;位于沉降室底部的收集罐,所述收集罐与沉降室相连通;与沉降室相连通的真空泵,所述真空泵用于使反应腔保持真空状态。所述装置制备的氮化铝纳米颗粒粒度小、纯度高,能够满足高要求器件的原材料需要;同时所述装置能够连续生产,生产效率和安全性高。
Device for preparing ceramic powder
制备陶瓷粉末的装置
HAN GANG (Autor:in) / GUO RUOBING (Autor:in) / QI YANLING (Autor:in) / CHENG XINGDE (Autor:in) / HAN QIHANG (Autor:in)
02.06.2023
Patent
Elektronische Ressource
Chinesisch
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