Preparation method of ZnO-BaTiO3 composite target material: Fid-Bau Portal

Preparation method of ZnO-BaTiO3 composite target material

HUANG JIJIE / WANG GUOLIANG

The invention belongs to the technical field of composite target material preparation, and particularly relates to a preparation method of a ZnO-BaTiO3 composite target material. The preparation method comprises the following steps: uniformly mixing ZnO powder, BaTiO3 powder and a binder, drying, pressing into a sheet material, and then quickly heating, sintering at high temperature and polishing to obtain the ZnO-BaTiO3 composite target material. The ZnO-BaTiO3 composite target material of which the purity is higher than 99.95% and the relative density is greater than 95% is prepared by adopting an improved normal-pressure sintering process; meanwhile, according to the preparation process of the composite target material, the operation steps are greatly reduced, the cost is low, manufacturing is convenient, the composite target material is more suitable for preparing a high-quality ZnO-BaTiO3 composite film, and the composite target material has important academic value and wide application prospects in the fields of thermistors, photoelectric conversion, resistive random access memory and the like.

本发明属于复合靶材制备技术领域，具体涉及一种ZnO‑BaTiO3复合靶材的制备方法。本发明将ZnO粉末、BaTiO3粉末和粘结剂混匀并干燥后压制为片材，然后经快速升温并高温烧结和抛光处理制得ZnO‑BaTiO3复合靶材。通过采用改进的常压烧结工艺，制备出纯度高于99.95％，相对密度大于95％的ZnO‑BaTiO3复合靶材；同时，该复合靶材的制备工艺，操作步骤大大减少，成本低，制作方便，更适用于制备高质量的ZnO‑BaTiO3复合薄膜，在热敏电阻、光电转换、阻变存储等领域均具有重要的学术价值和广泛的应用前景。

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