Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Substrate, preparation method and application
The invention provides a substrate, a preparation method and application, and belongs to the technical field of packaging substrates. The preparation method of the substrate disclosed by the invention comprises the following specific steps: forming a composite ceramic biscuit of AIN-Al2O3-C; and sintering the multiphase ceramic biscuit to obtain the aluminum nitride ceramic substrate. The aluminum oxide powder and the graphite powder are added into the aluminum nitride powder, the aluminum nitride is synthesized by carbon thermal reduction, the aluminum nitride powder in part of the raw materials is replaced by the aluminum nitride generated by reaction, and the cost of the aluminum oxide powder and the graphite powder is greatly lower than that of the aluminum nitride powder, so that the preparation cost of the aluminum nitride ceramic substrate is further reduced. In addition, graphite powder is used as a carbon source, so that an air glue discharging step in a traditional process can be omitted, the process is simplified, and the efficiency is improved.
本发明提供一种基板、制备方法及应用，属于封装基板技术领域。其中，本发明中基板的制备方法具体步骤包括：形成AIN‑Al2O3‑C的复相陶瓷素坯；对复相陶瓷素坯进行烧结处理以得到氮化铝陶瓷基板。本发明通过在氮化铝粉中加入氧化铝粉以及石墨粉，利用碳热还原合成氮化铝，通过反应生成的氮化铝取代部分原料中的氮化铝粉，由于氧化铝粉和石墨粉的成本大大低于氮化铝粉，以进一步降低氮化铝陶瓷基板的制备成本。另外，本发明以石墨粉作为碳源，可以省去传统工艺中的空气排胶步骤，以简化工艺，提高效率。
Substrate, preparation method and application
The invention provides a substrate, a preparation method and application, and belongs to the technical field of packaging substrates. The preparation method of the substrate disclosed by the invention comprises the following specific steps: forming a composite ceramic biscuit of AIN-Al2O3-C; and sintering the multiphase ceramic biscuit to obtain the aluminum nitride ceramic substrate. The aluminum oxide powder and the graphite powder are added into the aluminum nitride powder, the aluminum nitride is synthesized by carbon thermal reduction, the aluminum nitride powder in part of the raw materials is replaced by the aluminum nitride generated by reaction, and the cost of the aluminum oxide powder and the graphite powder is greatly lower than that of the aluminum nitride powder, so that the preparation cost of the aluminum nitride ceramic substrate is further reduced. In addition, graphite powder is used as a carbon source, so that an air glue discharging step in a traditional process can be omitted, the process is simplified, and the efficiency is improved.
本发明提供一种基板、制备方法及应用，属于封装基板技术领域。其中，本发明中基板的制备方法具体步骤包括：形成AIN‑Al2O3‑C的复相陶瓷素坯；对复相陶瓷素坯进行烧结处理以得到氮化铝陶瓷基板。本发明通过在氮化铝粉中加入氧化铝粉以及石墨粉，利用碳热还原合成氮化铝，通过反应生成的氮化铝取代部分原料中的氮化铝粉，由于氧化铝粉和石墨粉的成本大大低于氮化铝粉，以进一步降低氮化铝陶瓷基板的制备成本。另外，本发明以石墨粉作为碳源，可以省去传统工艺中的空气排胶步骤，以简化工艺，提高效率。
Substrate, preparation method and application
一种基板、制备方法及应用
HE JINHUA (Autor:in) / WANG JING (Autor:in) / WU CHAO (Autor:in) / LIANG CHAO (Autor:in) / FU YIBING (Autor:in)
11.07.2023
Patent
Elektronische Ressource
Chinesisch
Ceramic composition, ceramic substrate and preparation method and application of ceramic substrate
| Europäisches Patentamt | 2023
Ceramic substrate and preparation method and application thereof
| Europäisches Patentamt | 2024
Ceramic substrate and preparation method and application thereof
| Europäisches Patentamt | 2024
Alumina ceramic substrate material, preparation method and application
| Europäisches Patentamt | 2024
Aluminum nitride substrate and preparation method and application thereof
| Europäisches Patentamt | 2023