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Composite crucible and preparation method and application thereof
The invention belongs to the technical field of crucibles, and particularly relates to a composite crucible and a preparation method and application thereof. The preparation method comprises the following steps: sequentially carrying out first heat treatment, chemical vapor deposition and second heat treatment on a carbon fiber preform to obtain a crucible blank; the crucible blank is soaked in a resin solution, curing, cracking carbonization and third heat treatment are sequentially conducted, and a carbon/carbon crucible base body is obtained; placing the carbon/carbon crucible matrix in a silicon nitride impregnation liquid, and sequentially carrying out PIP impregnation treatment and fourth heat treatment to obtain a silicon-carbon-nitrogen crucible matrix; and carrying out silicon plating treatment on the silicon-carbon-nitrogen crucible substrate to obtain the composite crucible. According to the method, the silicon-carbon-nitrogen composite coating is generated on the surface of the carbon crucible base body through in-situ reaction through the PIP dipping technology and the high-temperature evaporation technology, high-temperature silicon liquid infiltration, reaction with the crucible base body and silicification corrosion can be effectively prevented, the effect of protecting the carbon crucible base body is achieved, and the service life of the crucible is further prolonged.
本发明属于坩埚技术领域,具体涉及一种复合坩埚及其制备方法和应用。本发明将碳纤维预制体依次进行第一热处理、化学气相沉积和第二热处理,得到坩埚坯体;将所述坩埚坯体浸渍到树脂溶液中,依次进行固化、裂解碳化和第三热处理,得到碳/碳坩埚基体;将所述碳/碳坩埚基体置于氮化硅浸渍液中,依次进行PIP浸渍处理和第四热处理,得到硅碳氮坩埚基体;对所述硅碳氮坩埚基体进行镀硅处理,得到所述复合坩埚。本发明通过PIP浸渍工艺与高温蒸镀工艺,在碳坩埚基体表面原位反应生成硅碳氮复合涂层,可有效防止高温硅液浸渗,与坩埚基体发生反应,防止硅化侵蚀的发生,起到保护碳坩埚基体的作用,进一步提高坩埚的使用寿命。
Composite crucible and preparation method and application thereof
The invention belongs to the technical field of crucibles, and particularly relates to a composite crucible and a preparation method and application thereof. The preparation method comprises the following steps: sequentially carrying out first heat treatment, chemical vapor deposition and second heat treatment on a carbon fiber preform to obtain a crucible blank; the crucible blank is soaked in a resin solution, curing, cracking carbonization and third heat treatment are sequentially conducted, and a carbon/carbon crucible base body is obtained; placing the carbon/carbon crucible matrix in a silicon nitride impregnation liquid, and sequentially carrying out PIP impregnation treatment and fourth heat treatment to obtain a silicon-carbon-nitrogen crucible matrix; and carrying out silicon plating treatment on the silicon-carbon-nitrogen crucible substrate to obtain the composite crucible. According to the method, the silicon-carbon-nitrogen composite coating is generated on the surface of the carbon crucible base body through in-situ reaction through the PIP dipping technology and the high-temperature evaporation technology, high-temperature silicon liquid infiltration, reaction with the crucible base body and silicification corrosion can be effectively prevented, the effect of protecting the carbon crucible base body is achieved, and the service life of the crucible is further prolonged.
本发明属于坩埚技术领域,具体涉及一种复合坩埚及其制备方法和应用。本发明将碳纤维预制体依次进行第一热处理、化学气相沉积和第二热处理,得到坩埚坯体;将所述坩埚坯体浸渍到树脂溶液中,依次进行固化、裂解碳化和第三热处理,得到碳/碳坩埚基体;将所述碳/碳坩埚基体置于氮化硅浸渍液中,依次进行PIP浸渍处理和第四热处理,得到硅碳氮坩埚基体;对所述硅碳氮坩埚基体进行镀硅处理,得到所述复合坩埚。本发明通过PIP浸渍工艺与高温蒸镀工艺,在碳坩埚基体表面原位反应生成硅碳氮复合涂层,可有效防止高温硅液浸渗,与坩埚基体发生反应,防止硅化侵蚀的发生,起到保护碳坩埚基体的作用,进一步提高坩埚的使用寿命。
Composite crucible and preparation method and application thereof
一种复合坩埚及其制备方法和应用
JIANG JIE (Autor:in) / JIA LINTAO (Autor:in) / SUN ZHULIN (Autor:in) / IKEZAWA SATOSHI (Autor:in)
21.11.2023
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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