Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Electrostatic chuck and preparation method thereof
The invention relates to the technical field of electrostatic chucks, and discloses an electrostatic chuck which comprises a dielectric layer, an electrode layer, a ceramic layer and a base which are arranged from top to bottom. The surface of the dielectric layer is provided with a plurality of first gas channels which are arranged in the radial direction and a plurality of second gas channels which are coaxial with the circle center of the dielectric layer. The first gas channel and the second gas channel are intersected; the upper surfaces of the first gas channel and the second gas channel are open sides; a plurality of ventilation parts communicated with the first gas channel and/or the second gas channel are arranged on the surface of the dielectric layer; the ventilation part is connected with a fixing hole penetrating through the electrode layer, the ceramic layer and the base; the fixing hole is communicated with the ventilation part, the fixing hole is filled with an air guide column, the air guide column is made of a porous material, and the porosity of the air guide column is 30%-50%. According to the electrostatic chuck, helium can flow stably, and the gas guide columns have corrosion resistance.
本发明涉及静电卡盘技术领域，公开了一种静电卡盘，包括由上而下布置的介电层、电极层、陶瓷层、基座；所述介电层的表面设有若干径向布置的第一气体通道和若干与介电层的圆心同轴布置的第二气体通道；所述第一气体通道和第二气体通道交汇；所述第一气体通道和第二气体通道的上表面为开放侧；所述介电层的表面设有多个与第一气体通道和/或第二气体通道连通的通气部；所述通气部连接有贯穿电极层、陶瓷层、基座的固定孔；所述固定孔和通气部连通且所述固定孔内填充有导气柱，所述导气柱为多孔材质的导气柱且孔隙率为30％～50％。本静电卡盘能使氦气平稳地流动，而且导气柱具有耐腐蚀性。
Electrostatic chuck and preparation method thereof
The invention relates to the technical field of electrostatic chucks, and discloses an electrostatic chuck which comprises a dielectric layer, an electrode layer, a ceramic layer and a base which are arranged from top to bottom. The surface of the dielectric layer is provided with a plurality of first gas channels which are arranged in the radial direction and a plurality of second gas channels which are coaxial with the circle center of the dielectric layer. The first gas channel and the second gas channel are intersected; the upper surfaces of the first gas channel and the second gas channel are open sides; a plurality of ventilation parts communicated with the first gas channel and/or the second gas channel are arranged on the surface of the dielectric layer; the ventilation part is connected with a fixing hole penetrating through the electrode layer, the ceramic layer and the base; the fixing hole is communicated with the ventilation part, the fixing hole is filled with an air guide column, the air guide column is made of a porous material, and the porosity of the air guide column is 30%-50%. According to the electrostatic chuck, helium can flow stably, and the gas guide columns have corrosion resistance.
本发明涉及静电卡盘技术领域，公开了一种静电卡盘，包括由上而下布置的介电层、电极层、陶瓷层、基座；所述介电层的表面设有若干径向布置的第一气体通道和若干与介电层的圆心同轴布置的第二气体通道；所述第一气体通道和第二气体通道交汇；所述第一气体通道和第二气体通道的上表面为开放侧；所述介电层的表面设有多个与第一气体通道和/或第二气体通道连通的通气部；所述通气部连接有贯穿电极层、陶瓷层、基座的固定孔；所述固定孔和通气部连通且所述固定孔内填充有导气柱，所述导气柱为多孔材质的导气柱且孔隙率为30％～50％。本静电卡盘能使氦气平稳地流动，而且导气柱具有耐腐蚀性。
Electrostatic chuck and preparation method thereof
一种静电卡盘及其制备方法
LIU ZHISHUANG (Autor:in) / ZENG GUANGFENG (Autor:in) / GAO TAO (Autor:in) / CHEN YUCHENG (Autor:in)
08.12.2023
Patent
Elektronische Ressource
Chinesisch
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