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Aluminum zinc oxide target material and preparation method thereof
The invention belongs to the technical field of semiconductors, and discloses a preparation method of an aluminum zinc oxide target material, which comprises the following steps: step 1, mixing aluminum oxide powder, a first dispersing agent and water to prepare slurry, and grinding to obtain first slurry; 2, mixing the first slurry, zinc oxide powder and a second dispersing agent, pulping and grinding to obtain second slurry; step 3, performing spray granulation on the second slurry to obtain powder with apparent density of 0.8-1 g/cm < 3 >; 4, performing mold pressing and cold isostatic pressing on the powder obtained in the step 3 to obtain a zinc aluminum oxide target blank; and 5, sintering the aluminum zinc oxide target blank to obtain the aluminum zinc oxide target material. By controlling the particle size of spray granulation, the powder with a certain bulk density is prepared, and the target material with large relative density and low resistivity can be prepared without using a binder. Meanwhile, the invention also provides the aluminum zinc oxide target material.
本发明属于半导体技术领域，公开了一种氧化锌铝靶材的制备方法，包括如下步骤：步骤1：将氧化铝粉末、第一分散剂、水混合制浆并研磨，得到第一浆料；步骤2：将第一浆料、氧化锌粉末、第二分散剂混合制浆并研磨，得到第二浆料；步骤3：采用第二浆料喷雾造粒得到松装密度为0.8‑1g/cm3的粉末；步骤4：将步骤3得到的粉末进行模压和冷等静压，得到氧化锌铝靶胚；步骤5：将氧化锌铝靶胚烧结得到氧化锌铝靶材。本发明通过控制喷雾造粒的粒径，制造出具有一定的松密度的粉末，可以不使用粘结剂一样可以制备出相对密度大、电阻率低的靶材。同时，本发明还提供了该氧化锌铝靶材。
Aluminum zinc oxide target material and preparation method thereof
The invention belongs to the technical field of semiconductors, and discloses a preparation method of an aluminum zinc oxide target material, which comprises the following steps: step 1, mixing aluminum oxide powder, a first dispersing agent and water to prepare slurry, and grinding to obtain first slurry; 2, mixing the first slurry, zinc oxide powder and a second dispersing agent, pulping and grinding to obtain second slurry; step 3, performing spray granulation on the second slurry to obtain powder with apparent density of 0.8-1 g/cm < 3 >; 4, performing mold pressing and cold isostatic pressing on the powder obtained in the step 3 to obtain a zinc aluminum oxide target blank; and 5, sintering the aluminum zinc oxide target blank to obtain the aluminum zinc oxide target material. By controlling the particle size of spray granulation, the powder with a certain bulk density is prepared, and the target material with large relative density and low resistivity can be prepared without using a binder. Meanwhile, the invention also provides the aluminum zinc oxide target material.
本发明属于半导体技术领域，公开了一种氧化锌铝靶材的制备方法，包括如下步骤：步骤1：将氧化铝粉末、第一分散剂、水混合制浆并研磨，得到第一浆料；步骤2：将第一浆料、氧化锌粉末、第二分散剂混合制浆并研磨，得到第二浆料；步骤3：采用第二浆料喷雾造粒得到松装密度为0.8‑1g/cm3的粉末；步骤4：将步骤3得到的粉末进行模压和冷等静压，得到氧化锌铝靶胚；步骤5：将氧化锌铝靶胚烧结得到氧化锌铝靶材。本发明通过控制喷雾造粒的粒径，制造出具有一定的松密度的粉末，可以不使用粘结剂一样可以制备出相对密度大、电阻率低的靶材。同时，本发明还提供了该氧化锌铝靶材。
Aluminum zinc oxide target material and preparation method thereof
一种氧化锌铝靶材及其制备方法
LUO SISHI (Autor:in) / LI KAIJIE (Autor:in) / SHAO XUELIANG (Autor:in) / GU DESHENG (Autor:in) / ZHANG XINGYU (Autor:in)
29.03.2024
Patent
Elektronische Ressource
Chinesisch
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