Aluminum zinc oxide target material and preparation method thereof: Fid-Bau Portal

Aluminum zinc oxide target material and preparation method thereof

TAN HONGLEI / SHAO XUELIANG / LI KAIJIE / WANG QIFENG

The invention belongs to the field of target materials, and discloses a preparation method of an aluminum zinc oxide target material, which comprises the following steps: uniformly mixing zinc oxide powder, aluminum oxide powder, germanium oxide powder, a dispersant, a binder and pure water, and grinding to obtain first mixed slurry; adding a defoaming agent into the first mixed slurry, and stirring to obtain second mixed slurry; carrying out spray granulation, mixing and sieving on the second mixed slurry to obtain powder; pre-sintering the powder to obtain a pre-sintered body, sieving the pre-sintered body, and performing cold isostatic pressing on the pre-sintered body to obtain a green body; and finally, the obtained blank is subjected to vacuum pressure sintering, and the target material is obtained. Powder obtained through spray granulation is pre-sintered, a green body is subjected to vacuum pressure sintering, the density of the zinc aluminum oxide target material is improved, the number of internal air holes is reduced, and the transmittance of a film obtained through sputtering at the wavelength of 400-800 nm is increased; in addition, the invention also discloses the zinc aluminum oxide target material prepared by adopting the method and application of the zinc aluminum oxide target material.

本发明属于靶材领域，公开了一种氧化锌铝靶材的制备方法，先将氧化锌粉末、氧化铝粉末、氧化锗粉末、分散剂、粘结剂以及纯水混合均匀，研磨，得到第一混合浆料；再将第一混合浆料中加入消泡剂，搅拌，得到第二混合浆料；而后将第二混合浆料进行喷雾造粒，混合、过筛，得到粉末；再将粉末进行预烧结，得到预烧结体，过筛，对预烧结体进行冷等静压，得到坯体；最后将得到的坯体进行真空加压烧结，得到靶材；通过对喷雾造粒得到的粉体进行预烧结以及对坯体进行真空加压烧结，改善氧化锌铝靶材的密度，减少内部气孔数量，使得溅射得到的薄膜，在400～800nm波长的透过率增大；此外本申请还公开了采用上述方法制备的氧化锌铝靶材及其应用。

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