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Graphite evaporation boat and preparation method thereof
The invention discloses a graphite evaporation boat and a preparation method thereof, a coating structure is formed on the evaporation side of the evaporation boat, and the coating structure comprises the following components by mass: 60-80% of a matrix filler; 10-15% of silicon; 1 to 5% of nickel-aluminum composite powder; 10-15% of a heat-conducting filler; 0.5 to 2% of an adhesive; and the coating structure is formed by hot pressing sintering at gradually increased temperatures. Based on the multi-component coating, melt diffusion of different components is easily formed through multiple times of hot pressing sintering treatment at different temperatures in the components, internal crystal components are subjected to multi-phase fusion and reaction in the sintering process so as to gradually form the densified composite ceramic coating, and the corrosion resistance of the graphite evaporation boat can be improved.
本发明公开了一种石墨蒸发舟及其制备方法,蒸发舟的蒸发侧形成涂层结构,涂层结构包括如下质量分数的各组分:基体填料60%‑80%;硅10‑15%;镍‑铝复合粉体,1‑5%;导热填料,10‑15%;胶黏剂0.5‑2%;经过分次递增的温度热压烧结形成涂层结构。本发明基于多组分的涂层,组分中通过多次不同温度的热压烧结处理,易于形成不同组分的熔体扩散,内部晶体组分在烧结过程中进行多相的熔融、反应,以逐渐形成致密化的复合陶瓷涂层,能够提升石墨蒸发舟的耐蚀性能。
Graphite evaporation boat and preparation method thereof
The invention discloses a graphite evaporation boat and a preparation method thereof, a coating structure is formed on the evaporation side of the evaporation boat, and the coating structure comprises the following components by mass: 60-80% of a matrix filler; 10-15% of silicon; 1 to 5% of nickel-aluminum composite powder; 10-15% of a heat-conducting filler; 0.5 to 2% of an adhesive; and the coating structure is formed by hot pressing sintering at gradually increased temperatures. Based on the multi-component coating, melt diffusion of different components is easily formed through multiple times of hot pressing sintering treatment at different temperatures in the components, internal crystal components are subjected to multi-phase fusion and reaction in the sintering process so as to gradually form the densified composite ceramic coating, and the corrosion resistance of the graphite evaporation boat can be improved.
本发明公开了一种石墨蒸发舟及其制备方法,蒸发舟的蒸发侧形成涂层结构,涂层结构包括如下质量分数的各组分:基体填料60%‑80%;硅10‑15%;镍‑铝复合粉体,1‑5%;导热填料,10‑15%;胶黏剂0.5‑2%;经过分次递增的温度热压烧结形成涂层结构。本发明基于多组分的涂层,组分中通过多次不同温度的热压烧结处理,易于形成不同组分的熔体扩散,内部晶体组分在烧结过程中进行多相的熔融、反应,以逐渐形成致密化的复合陶瓷涂层,能够提升石墨蒸发舟的耐蚀性能。
Graphite evaporation boat and preparation method thereof
石墨蒸发舟及其制备方法
LIU ZHIKANG (Autor:in) / GARON (Autor:in) / WU MINGZHONG (Autor:in) / JIAO XINPENG (Autor:in) / YIN GUOFENG (Autor:in)
02.04.2024
Patent
Elektronische Ressource
Chinesisch
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