Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Boron nitride coating evaporation boat and preparation method thereof
The invention provides a boron nitride coating evaporation boat and a preparation method thereof, and the preparation method comprises the following steps: placing a boron source at the bottom of a reaction chamber made of a boron nitride material, placing a graphite evaporation boat substrate in the reaction chamber and keeping a distance of 20-50mm between the graphite evaporation boat substrate and the boron source, wherein the boron source is selected from any one of diboron trioxide and boric acid; placing the reaction chamber in a chemical vapor deposition furnace, vacuumizing the chemical vapor deposition furnace, heating to 500-700 DEG C, introducing nitrogen, keeping positive pressure in the furnace, and continuously introducing nitrogen in the reaction; and heating the chemical vapor deposition furnace to the reaction temperature of 1750-1950 DEG C, keeping the temperature for 1-8 hours, and depositing and growing the boron nitride coating on the graphite evaporation boat substrate. The raw materials are non-toxic, non-flammable, safe and easy to obtain, and the preparation process is more environment-friendly and safer. And the preparation process is easy to control, the reaction chambers can be placed in a chemical vapor deposition furnace in batches, the production efficiency is high, and the preparation method is suitable for large-batch and large-scale production.
本发明提供了一种氮化硼涂层蒸发舟及其制备方法，其中制备方法包括：将硼源置于氮化硼材质的反应室底部，将石墨蒸发舟基体置于反应室并与硼源之间保持20～50mm的距离，硼源选自三氧化二硼和硼酸中的任一种；将反应室置于化学气相沉积炉，将化学气相沉积炉抽真空后升温至500～700℃后通入氮气，使炉内保持正压并在反应中持续通入氮气；使化学气相沉积炉升温至反应温度1750～1950℃，保温时间为1～8h，在石墨蒸发舟基体上沉积生长氮化硼涂层。本发明的原料无毒不易燃、安全易得，制备工艺更加环保和安全。且制备工艺易于控制，反应室可以成批放置在化学气相沉积炉中，生产效率高，适合大批量、规模化的生产。
Boron nitride coating evaporation boat and preparation method thereof
The invention provides a boron nitride coating evaporation boat and a preparation method thereof, and the preparation method comprises the following steps: placing a boron source at the bottom of a reaction chamber made of a boron nitride material, placing a graphite evaporation boat substrate in the reaction chamber and keeping a distance of 20-50mm between the graphite evaporation boat substrate and the boron source, wherein the boron source is selected from any one of diboron trioxide and boric acid; placing the reaction chamber in a chemical vapor deposition furnace, vacuumizing the chemical vapor deposition furnace, heating to 500-700 DEG C, introducing nitrogen, keeping positive pressure in the furnace, and continuously introducing nitrogen in the reaction; and heating the chemical vapor deposition furnace to the reaction temperature of 1750-1950 DEG C, keeping the temperature for 1-8 hours, and depositing and growing the boron nitride coating on the graphite evaporation boat substrate. The raw materials are non-toxic, non-flammable, safe and easy to obtain, and the preparation process is more environment-friendly and safer. And the preparation process is easy to control, the reaction chambers can be placed in a chemical vapor deposition furnace in batches, the production efficiency is high, and the preparation method is suitable for large-batch and large-scale production.
本发明提供了一种氮化硼涂层蒸发舟及其制备方法，其中制备方法包括：将硼源置于氮化硼材质的反应室底部，将石墨蒸发舟基体置于反应室并与硼源之间保持20～50mm的距离，硼源选自三氧化二硼和硼酸中的任一种；将反应室置于化学气相沉积炉，将化学气相沉积炉抽真空后升温至500～700℃后通入氮气，使炉内保持正压并在反应中持续通入氮气；使化学气相沉积炉升温至反应温度1750～1950℃，保温时间为1～8h，在石墨蒸发舟基体上沉积生长氮化硼涂层。本发明的原料无毒不易燃、安全易得，制备工艺更加环保和安全。且制备工艺易于控制，反应室可以成批放置在化学气相沉积炉中，生产效率高，适合大批量、规模化的生产。
Boron nitride coating evaporation boat and preparation method thereof
一种氮化硼涂层蒸发舟及其制备方法
HUANG XIANGDONG (Autor:in) / HU CHANGKAI (Autor:in)
04.06.2021
Patent
Elektronische Ressource
Chinesisch
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