Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of lead-free piezoelectric ceramic material
The invention discloses a preparation method of a lead-free piezoelectric ceramic material. The method comprises the following steps: providing a lead-free piezoelectric ceramic substrate; depositing a first lead-free piezoelectric ceramic layer on the lead-free piezoelectric ceramic substrate through magnetron sputtering; depositing a second lead-free piezoelectric ceramic layer on the first lead-free piezoelectric ceramic layer through magnetron sputtering; depositing a third lead-free piezoelectric ceramic layer on the second lead-free piezoelectric ceramic layer through magnetron sputtering; wherein the lead-free piezoelectric ceramic base material, the first lead-free piezoelectric ceramic layer, the second lead-free piezoelectric ceramic layer and the third lead-free piezoelectric ceramic layer all have a chemical general formula of Ba < 0.86 > Sr < 0.14 > Ti < 0.92 > Zr < 0.08 > O < 3-0.16 x > F < 0.32 x >, x is greater than or equal to 0.2 and less than or equal to 1, the third lead-free piezoelectric ceramic layer has more fluorine elements than the second lead-free piezoelectric ceramic layer, and the lead-free piezoelectric ceramic layer has a larger specific surface area than the second lead-free piezoelectric ceramic layer. The second lead-free piezoelectric ceramic layer has more fluorine elements than the first lead-free piezoelectric ceramic layer, and the first lead-free piezoelectric ceramic layer has more fluorine elements than the lead-free piezoelectric ceramic substrate.
本发明公开了一种无铅压电陶瓷材料的制备方法，方法包括：提供无铅压电陶瓷基材；在无铅压电陶瓷基材上磁控溅射沉积第一无铅压电陶瓷层；在第一无铅压电陶瓷层上磁控溅射沉积第二无铅压电陶瓷层；在第二无铅压电陶瓷层上磁控溅射沉积第三无铅压电陶瓷层；其中，无铅压电陶瓷基材、第一无铅压电陶瓷层、第二无铅压电陶瓷层以及第三无铅压电陶瓷层均具有化学通式Ba0.86Sr0.14Ti0.92Zr0.08O3‑0.16xF0.32x，其中，0.2≤x≤1，其中，第三无铅压电陶瓷层比第二无铅压电陶瓷层具有更多的氟元素，第二无铅压电陶瓷层比第一无铅压电陶瓷层具有更多的氟元素，第一无铅压电陶瓷层比无铅压电陶瓷基材具有更多的氟元素。
Preparation method of lead-free piezoelectric ceramic material
The invention discloses a preparation method of a lead-free piezoelectric ceramic material. The method comprises the following steps: providing a lead-free piezoelectric ceramic substrate; depositing a first lead-free piezoelectric ceramic layer on the lead-free piezoelectric ceramic substrate through magnetron sputtering; depositing a second lead-free piezoelectric ceramic layer on the first lead-free piezoelectric ceramic layer through magnetron sputtering; depositing a third lead-free piezoelectric ceramic layer on the second lead-free piezoelectric ceramic layer through magnetron sputtering; wherein the lead-free piezoelectric ceramic base material, the first lead-free piezoelectric ceramic layer, the second lead-free piezoelectric ceramic layer and the third lead-free piezoelectric ceramic layer all have a chemical general formula of Ba < 0.86 > Sr < 0.14 > Ti < 0.92 > Zr < 0.08 > O < 3-0.16 x > F < 0.32 x >, x is greater than or equal to 0.2 and less than or equal to 1, the third lead-free piezoelectric ceramic layer has more fluorine elements than the second lead-free piezoelectric ceramic layer, and the lead-free piezoelectric ceramic layer has a larger specific surface area than the second lead-free piezoelectric ceramic layer. The second lead-free piezoelectric ceramic layer has more fluorine elements than the first lead-free piezoelectric ceramic layer, and the first lead-free piezoelectric ceramic layer has more fluorine elements than the lead-free piezoelectric ceramic substrate.
本发明公开了一种无铅压电陶瓷材料的制备方法，方法包括：提供无铅压电陶瓷基材；在无铅压电陶瓷基材上磁控溅射沉积第一无铅压电陶瓷层；在第一无铅压电陶瓷层上磁控溅射沉积第二无铅压电陶瓷层；在第二无铅压电陶瓷层上磁控溅射沉积第三无铅压电陶瓷层；其中，无铅压电陶瓷基材、第一无铅压电陶瓷层、第二无铅压电陶瓷层以及第三无铅压电陶瓷层均具有化学通式Ba0.86Sr0.14Ti0.92Zr0.08O3‑0.16xF0.32x，其中，0.2≤x≤1，其中，第三无铅压电陶瓷层比第二无铅压电陶瓷层具有更多的氟元素，第二无铅压电陶瓷层比第一无铅压电陶瓷层具有更多的氟元素，第一无铅压电陶瓷层比无铅压电陶瓷基材具有更多的氟元素。
Preparation method of lead-free piezoelectric ceramic material
一种无铅压电陶瓷材料的制备方法
YANG JIAXIN (Autor:in) / WU JIAJUN (Autor:in) / YANG HONGYU (Autor:in) / GUAN HUI (Autor:in) / WEN ZEJUN (Autor:in)
24.05.2024
Patent
Elektronische Ressource
Chinesisch
Preparation method of lead-free piezoelectric ceramic material
| Europäisches Patentamt | 2021
Lead-free piezoelectric ceramic material and preparation method thereof
| Europäisches Patentamt | 2024
Lead-free piezoelectric ceramic material and preparation method thereof
| Europäisches Patentamt | 2021