Preparation method of multilayer ceramic piezoelectric actuator: Fid-Bau Portal

Preparation method of multilayer ceramic piezoelectric actuator

WANG FANGFANG / TAN RENHUI / YAN KANG

The invention discloses a preparation method of a multilayer ceramic piezoelectric actuator. The method comprises the following steps: designing a multi-layer piezoelectric ceramic driver through a simulation calculation mode; establishing a three-dimensional finite element model of the multi-layer piezoelectric ceramic driver; analyzing displacement output conditions of the piezoelectric device in excitation processes of different voltages and frequencies; the multi-layer piezoelectric ceramic driver is prepared by adopting a low-temperature co-firing method: PZT ceramic powder is selected to prepare tape casting slurry, and the tape casting slurry is subjected to tape casting to form a ceramic green sheet; printing an inner electrode and laminating by adopting a hot pressing method; carrying out glue discharging and sintering on the sample, and externally electrodes; a displacement performance test is carried out on the sample prepared by the steps, and a simulation result is met.

本发明公开了一种多层陶瓷压电驱动器的制备方法。该方法包括：通过仿真计算的方式设计一种多层压电陶瓷驱动器：建立多层压电驱动器的三维有限元模型；分析压电器件在不同电压和频率激励过程中的位移输出情况；采用低温共烧方法制备多层压电陶瓷驱动器：选取PZT陶瓷粉体配制流延浆料并流延成陶瓷生片；印刷内电极并采用热压法进行叠层；样品进行排胶与烧结以及被外电极；通过上述步骤制备的样品进行位移性能测试，符合仿真结果。

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