Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Method for preparing AZO ceramic target material based on discharge plasma assisted cold sintering
The invention provides a method for preparing an AZO ceramic target material based on discharge plasma assisted cold sintering, and the preparation method of the AZO ceramic target material comprises the following steps: mixing a zinc acetate solution and an aluminum nitrate solution to obtain a mixed solution with the pH value of 8-9; putting the mixed solution into a reaction kettle, and then putting the mixed solution and the reaction kettle into a drying box for drying and heat preservation to obtain hydrothermal product AZO precursor powder; stirring and dispersing the AZO precursor powder, performing suction filtration and washing by using a water circulation type suction filtration machine, and then performing low-temperature drying to obtain AZO wet powder; the AZO wet powder is put into a mold to be pre-pressed and formed, and an AZO blank is obtained; putting the AZO blank and a mold into a discharge plasma sintering furnace, and carrying out discharge plasma assisted cold sintering at low temperature and high pressure to obtain a semi-finished target; and the semi-finished product target material is subjected to machining, copper back plate brazing, cleaning, drying and vacuum packaging, and the AZO ceramic target material finished product is obtained. According to the method, the high-density and fine-grain AZO ceramic target material can be prepared with low energy consumption.
本发明提供一种基于放电等离子体辅助冷烧结制备AZO陶瓷靶材的方法，该AZO陶瓷靶材的制备方法为：先将醋酸锌溶液和硝酸铝溶液混合，得到pH值为8~9的混合溶液；将混合溶液装入反应釜中，然后一同置于干燥箱中干燥保温，得到水热产物AZO前驱粉；将AZO前驱粉经搅拌分散处理后，利用水循环式抽滤机抽滤并洗涤，然后进行低温干燥，获得AZO湿状粉；将AZO湿状粉放入模具中预压成型，得到AZO坯材；将AZO坯材同模具一同放入放电等离子烧结炉内，在低温高压下经过放电等离子体辅助冷烧结得到半成品靶材；将半成品靶材经过机械加工、钎焊铜背板、清洗、干燥、真空封装，获得AZO陶瓷靶材成品。通过上述方法能低能耗制备高致密、细晶的AZO陶瓷靶材。
Method for preparing AZO ceramic target material based on discharge plasma assisted cold sintering
The invention provides a method for preparing an AZO ceramic target material based on discharge plasma assisted cold sintering, and the preparation method of the AZO ceramic target material comprises the following steps: mixing a zinc acetate solution and an aluminum nitrate solution to obtain a mixed solution with the pH value of 8-9; putting the mixed solution into a reaction kettle, and then putting the mixed solution and the reaction kettle into a drying box for drying and heat preservation to obtain hydrothermal product AZO precursor powder; stirring and dispersing the AZO precursor powder, performing suction filtration and washing by using a water circulation type suction filtration machine, and then performing low-temperature drying to obtain AZO wet powder; the AZO wet powder is put into a mold to be pre-pressed and formed, and an AZO blank is obtained; putting the AZO blank and a mold into a discharge plasma sintering furnace, and carrying out discharge plasma assisted cold sintering at low temperature and high pressure to obtain a semi-finished target; and the semi-finished product target material is subjected to machining, copper back plate brazing, cleaning, drying and vacuum packaging, and the AZO ceramic target material finished product is obtained. According to the method, the high-density and fine-grain AZO ceramic target material can be prepared with low energy consumption.
本发明提供一种基于放电等离子体辅助冷烧结制备AZO陶瓷靶材的方法，该AZO陶瓷靶材的制备方法为：先将醋酸锌溶液和硝酸铝溶液混合，得到pH值为8~9的混合溶液；将混合溶液装入反应釜中，然后一同置于干燥箱中干燥保温，得到水热产物AZO前驱粉；将AZO前驱粉经搅拌分散处理后，利用水循环式抽滤机抽滤并洗涤，然后进行低温干燥，获得AZO湿状粉；将AZO湿状粉放入模具中预压成型，得到AZO坯材；将AZO坯材同模具一同放入放电等离子烧结炉内，在低温高压下经过放电等离子体辅助冷烧结得到半成品靶材；将半成品靶材经过机械加工、钎焊铜背板、清洗、干燥、真空封装，获得AZO陶瓷靶材成品。通过上述方法能低能耗制备高致密、细晶的AZO陶瓷靶材。
Method for preparing AZO ceramic target material based on discharge plasma assisted cold sintering
一种基于放电等离子体辅助冷烧结制备AZO陶瓷靶材的方法
LI ZHAOYANG (Autor:in) / LI BIN (Autor:in) / LI JIWEN (Autor:in) / SHANGGUAN LINJIAN (Autor:in) / NIE FUQUAN (Autor:in) / JIA TIEKUN (Autor:in) / SHI XUNWANG (Autor:in) / CHEN ZHIYONG (Autor:in) / LIU JIYAO (Autor:in) / HOU JIAN (Autor:in)
23.07.2024
Patent
Elektronische Ressource
Chinesisch
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