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Ceramic fiber-based high-temperature-resistant capacitive pressure sensor and preparation method thereof
The invention relates to the technical field of flexible pressure sensing, in particular to a ceramic fiber-based high-temperature-resistant capacitive pressure sensor and a preparation method thereof. The ceramic fiber-based high-temperature-resistant capacitive pressure sensor comprises upper and lower packaging layers, upper and lower electrode layers, a dielectric layer and upper and lower copper wires; the packaging layer is composed of a PET film and an organic silicon film. The inner wall of the carbon cloth fabric electrode layer is sprayed with carbon particles, the surface area of the electrode can be increased, the contact between the electrode layer and the dielectric layer is improved, and due to the giant dielectric constant and high-temperature dielectric stability of CCTO ceramic of the dielectric layer, the length-diameter ratio of nanofibers, the porous structure of a fiber film and the air permeability of the fabric electrode, the surface area of the electrode can be increased. Excellent high-temperature dielectric stability and good flexibility are shown; the high-temperature-resistant pressure sensor can be applied to a high-temperature environment, has a high signal-to-noise ratio, and can effectively resist the influence of environmental noise, so that the high-temperature-resistant pressure sensor has relatively large deformation quantity in the compression process, the electrode distance of the parallel-plate capacitor is effectively reduced, the sensitivity and the responsiveness of the sensor are enhanced, and the pressure sensor has high-temperature-resistant performance.
本发明涉及柔性压力传感技术领域,具体涉及一种陶瓷纤维基耐高温电容型压力传感器及其制备方法,包括上下封装层、上下电极层、介电层和上下铜导线;封装层由PET薄膜和有机硅薄膜构成;碳布织物电极层的内壁喷涂有碳颗粒,可以增加电极表面积,改善电极层与介电层之间的接触,由于介电层CCTO陶瓷的巨介电常数和高温介电稳定性、纳米纤维的长径比和纤维薄膜的多孔结构、以及织物电极的透气性,展现出优异的高温介电稳定性和良好的柔韧性;不仅可以应用于高温环境下且具有高信噪比,能够有效抵抗环境噪音的影响,使其在压缩过程中具有较大的形变量,有效降低平行板电容器的电极间距,增强传感器的灵敏度和响应性,使得压力传感器具备耐高温的性能。
Ceramic fiber-based high-temperature-resistant capacitive pressure sensor and preparation method thereof
The invention relates to the technical field of flexible pressure sensing, in particular to a ceramic fiber-based high-temperature-resistant capacitive pressure sensor and a preparation method thereof. The ceramic fiber-based high-temperature-resistant capacitive pressure sensor comprises upper and lower packaging layers, upper and lower electrode layers, a dielectric layer and upper and lower copper wires; the packaging layer is composed of a PET film and an organic silicon film. The inner wall of the carbon cloth fabric electrode layer is sprayed with carbon particles, the surface area of the electrode can be increased, the contact between the electrode layer and the dielectric layer is improved, and due to the giant dielectric constant and high-temperature dielectric stability of CCTO ceramic of the dielectric layer, the length-diameter ratio of nanofibers, the porous structure of a fiber film and the air permeability of the fabric electrode, the surface area of the electrode can be increased. Excellent high-temperature dielectric stability and good flexibility are shown; the high-temperature-resistant pressure sensor can be applied to a high-temperature environment, has a high signal-to-noise ratio, and can effectively resist the influence of environmental noise, so that the high-temperature-resistant pressure sensor has relatively large deformation quantity in the compression process, the electrode distance of the parallel-plate capacitor is effectively reduced, the sensitivity and the responsiveness of the sensor are enhanced, and the pressure sensor has high-temperature-resistant performance.
本发明涉及柔性压力传感技术领域,具体涉及一种陶瓷纤维基耐高温电容型压力传感器及其制备方法,包括上下封装层、上下电极层、介电层和上下铜导线;封装层由PET薄膜和有机硅薄膜构成;碳布织物电极层的内壁喷涂有碳颗粒,可以增加电极表面积,改善电极层与介电层之间的接触,由于介电层CCTO陶瓷的巨介电常数和高温介电稳定性、纳米纤维的长径比和纤维薄膜的多孔结构、以及织物电极的透气性,展现出优异的高温介电稳定性和良好的柔韧性;不仅可以应用于高温环境下且具有高信噪比,能够有效抵抗环境噪音的影响,使其在压缩过程中具有较大的形变量,有效降低平行板电容器的电极间距,增强传感器的灵敏度和响应性,使得压力传感器具备耐高温的性能。
Ceramic fiber-based high-temperature-resistant capacitive pressure sensor and preparation method thereof
一种陶瓷纤维基耐高温电容型压力传感器及其制备方法
HUANG JINGXIA (Autor:in) / SHAN XIANGYU (Autor:in) / REN HONGYU (Autor:in) / HU WEN (Autor:in) / YIN LIMENG (Autor:in) / WANG HONG (Autor:in)
13.08.2024
Patent
Elektronische Ressource
Chinesisch
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