Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Tantalum carbide composite coating and preparation method of tantalum carbide composite coating by combining pyrolysis with in-situ generation
The invention relates to the technical field of semiconductor materials, and discloses a tantalum carbide coating and a preparation method of pyrolysis combination in-situ generation thereof, the tantalum carbide coating comprises a transition layer and a tantalum carbide coating along the surface of a substrate from inside to outside, and the transition layer comprises tantalum carbide and 0-8 wt% of hafnium carbide; the preparation method comprises the following steps: respectively vaporizing raw materials, and then mixing to obtain a mixed precursor gas; in addition, a base material is preheated at a high temperature, then the mixed precursor gas is pyrolyzed through plasma flames and settled to the surface of the base material, cooling is conducted, and the tantalum carbide coating is obtained on the surface of the base material. According to the preparation method, the tantalum carbide coating is formed and attached to the surface of the base body through the high-temperature pyrolysis combined in-situ growth technology, the transition layer containing hafnium carbide is further formed between the base body and the tantalum carbide coating, the tantalum carbide coating has the higher combining capacity, the thickness is uniform, compactness is high, the surface smoothness is high, and the preparation method is higher in production efficiency and lower in cost.
本发明涉及半导体材料技术领域，公开了一种碳化钽涂层及其热解结合原位生成的制备方法，沿基体表面由内向外的方向，所述碳化钽涂层包括过渡层和碳化钽涂层，所述过渡层包括碳化钽和0‑8wt％碳化铪；制备方法包括如下步骤：将原料分别汽化，后混合，得到混合前驱体气体；另将基体材料高温预热，再将混合前驱体气体通过等离子体火焰热解、沉降至基体材料表面，冷却，在基体材料表面得到碳化钽涂层。通过高温热解结合原位生长工艺，在基体表面形成并附着碳化钽涂层，且基体与碳化钽涂层之间还形成了含碳化铪的过渡层，使碳化钽涂层具有更高的结合能力，且厚度均匀、致密性强、表面光洁度高，该制备方法生产效率更高、成本更低。
Tantalum carbide composite coating and preparation method of tantalum carbide composite coating by combining pyrolysis with in-situ generation
The invention relates to the technical field of semiconductor materials, and discloses a tantalum carbide coating and a preparation method of pyrolysis combination in-situ generation thereof, the tantalum carbide coating comprises a transition layer and a tantalum carbide coating along the surface of a substrate from inside to outside, and the transition layer comprises tantalum carbide and 0-8 wt% of hafnium carbide; the preparation method comprises the following steps: respectively vaporizing raw materials, and then mixing to obtain a mixed precursor gas; in addition, a base material is preheated at a high temperature, then the mixed precursor gas is pyrolyzed through plasma flames and settled to the surface of the base material, cooling is conducted, and the tantalum carbide coating is obtained on the surface of the base material. According to the preparation method, the tantalum carbide coating is formed and attached to the surface of the base body through the high-temperature pyrolysis combined in-situ growth technology, the transition layer containing hafnium carbide is further formed between the base body and the tantalum carbide coating, the tantalum carbide coating has the higher combining capacity, the thickness is uniform, compactness is high, the surface smoothness is high, and the preparation method is higher in production efficiency and lower in cost.
本发明涉及半导体材料技术领域，公开了一种碳化钽涂层及其热解结合原位生成的制备方法，沿基体表面由内向外的方向，所述碳化钽涂层包括过渡层和碳化钽涂层，所述过渡层包括碳化钽和0‑8wt％碳化铪；制备方法包括如下步骤：将原料分别汽化，后混合，得到混合前驱体气体；另将基体材料高温预热，再将混合前驱体气体通过等离子体火焰热解、沉降至基体材料表面，冷却，在基体材料表面得到碳化钽涂层。通过高温热解结合原位生长工艺，在基体表面形成并附着碳化钽涂层，且基体与碳化钽涂层之间还形成了含碳化铪的过渡层，使碳化钽涂层具有更高的结合能力，且厚度均匀、致密性强、表面光洁度高，该制备方法生产效率更高、成本更低。
Tantalum carbide composite coating and preparation method of tantalum carbide composite coating by combining pyrolysis with in-situ generation
一种碳化钽复合涂层及其热解结合原位生成的制备方法
SONG XINFENG (Autor:in) / HE SHENG (Autor:in)
23.08.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
| Europäisches Patentamt | 2024