Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Preparation method of high-performance aluminum oxide composite ceramic
The invention discloses a preparation method of high-performance alumina composite ceramic, and belongs to the technical field of electrostatic chuck ceramic plate preparation, and the preparation method comprises the following steps: powder pretreatment: treating nano silicon carbide powder, pre-dispersing in a horizontal ball mill, adding a dispersant and nano alumina powder, and dispersing; the content of other substances in the treated powder needs to be tested; wherein the content of silicon carbide in the powder pretreatment is 0-10 wt%, and the content of aluminum oxide in the powder pretreatment is 90-100 wt%; the preparation method comprises the following steps: dissolving sol: firstly adding toluene, isopropanol and a plasticizer into a pneumatic sol machine, slowly and uniformly stirring, then adding PVB resin powder, and stirring to form PVB colloid; dispersing: firstly, weighing a certain amount of balls and a mixed solvent of toluene and n-butyl alcohol, putting into a stirring mill, turning on a stirring switch, and stirring for 1-4 hours; mixing: transferring the aluminum oxide and silicon carbide slurry in the stirring mill into a roller ball mill, adding PVB colloid, and stirring; and forming and sintering after vacuum defoaming.
本发明公开了一种高性能氧化铝复合陶瓷的制备方法，属于静电卡盘陶瓷板制备技术领域，包括：粉体预处理：将纳米碳化硅粉体进行处理再在卧式球磨机中进行预分散，加入分散剂，纳米氧化铝粉进行分散；经过处理后的粉体需要测试出其它物质含量；其中粉体预处理中的碳化硅的含量占比为0～10wt％，氧化铝的含量占比为90～100wt％；溶胶：先加甲苯、异丙醇和可塑剂于气动溶胶机内，缓慢均匀的搅拌，再加入PVB树脂粉，搅拌形成PVB胶体；分散：先称量一定量的球只、甲苯和正丁醇混合溶剂于搅拌磨中，打开搅拌开关搅拌1～4h；混合：转移搅拌磨中的氧化铝和碳化硅浆料于滚筒球磨机中，加入的PVB胶体，搅拌；真空脱泡后进行成型和烧结。
Preparation method of high-performance aluminum oxide composite ceramic
The invention discloses a preparation method of high-performance alumina composite ceramic, and belongs to the technical field of electrostatic chuck ceramic plate preparation, and the preparation method comprises the following steps: powder pretreatment: treating nano silicon carbide powder, pre-dispersing in a horizontal ball mill, adding a dispersant and nano alumina powder, and dispersing; the content of other substances in the treated powder needs to be tested; wherein the content of silicon carbide in the powder pretreatment is 0-10 wt%, and the content of aluminum oxide in the powder pretreatment is 90-100 wt%; the preparation method comprises the following steps: dissolving sol: firstly adding toluene, isopropanol and a plasticizer into a pneumatic sol machine, slowly and uniformly stirring, then adding PVB resin powder, and stirring to form PVB colloid; dispersing: firstly, weighing a certain amount of balls and a mixed solvent of toluene and n-butyl alcohol, putting into a stirring mill, turning on a stirring switch, and stirring for 1-4 hours; mixing: transferring the aluminum oxide and silicon carbide slurry in the stirring mill into a roller ball mill, adding PVB colloid, and stirring; and forming and sintering after vacuum defoaming.
本发明公开了一种高性能氧化铝复合陶瓷的制备方法，属于静电卡盘陶瓷板制备技术领域，包括：粉体预处理：将纳米碳化硅粉体进行处理再在卧式球磨机中进行预分散，加入分散剂，纳米氧化铝粉进行分散；经过处理后的粉体需要测试出其它物质含量；其中粉体预处理中的碳化硅的含量占比为0～10wt％，氧化铝的含量占比为90～100wt％；溶胶：先加甲苯、异丙醇和可塑剂于气动溶胶机内，缓慢均匀的搅拌，再加入PVB树脂粉，搅拌形成PVB胶体；分散：先称量一定量的球只、甲苯和正丁醇混合溶剂于搅拌磨中，打开搅拌开关搅拌1～4h；混合：转移搅拌磨中的氧化铝和碳化硅浆料于滚筒球磨机中，加入的PVB胶体，搅拌；真空脱泡后进行成型和烧结。
Preparation method of high-performance aluminum oxide composite ceramic
一种高性能氧化铝复合陶瓷的制备方法
ZHOU JUN (Autor:in) / LI JUN (Autor:in) / SHI ZHEYUAN (Autor:in) / ZHANG QIANWEN (Autor:in) / LONG JIHOU (Autor:in) / XIAO WEI (Autor:in)
12.11.2024
Patent
Elektronische Ressource
Chinesisch
IPC:
C04B
Kalk
,
LIME
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